Patents by Inventor Nagraj S. Kulkarni

Nagraj S. Kulkarni has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Dual chamber system providing simultaneous etch and deposition on opposing substrate sides for growing low defect density epitaxial layers
    Patent number: 7902047
    Abstract: A dual-chamber reactor can include a housing enclosing a volume having a divider therein, where the divider defines a first chamber and a second chamber. The divider can include a substrate holder that supports at least one substrate and exposes a first side of the substrate to the first chamber and a second side of the substrate to the second chamber. The first chamber can include an inlet for delivering at least one reagent to the first chamber for forming a film on the first side of the substrate, and the second chamber can include a removal device for removing material from the second side of the substrate.
    Type: Grant
    Filed: July 25, 2008
    Date of Patent: March 8, 2011
    Assignee: The United States of America as represented by the United States Department of Energy
    Inventors: Nagraj S. Kulkarni, Richard J. Kasica
  • DUAL CHAMBER SYSTEM PROVIDING SIMULTANEOUS ETCH AND DEPOSITION ON OPPOSING SUBSTRATE SIDES FOR GROWING LOW DEFECT DENSITY EPITAXIAL LAYERS
    Publication number: 20100013052
    Abstract: A dual-chamber reactor can include a housing enclosing a volume having a divider therein, where the divider defines a first chamber and a second chamber. The divider can include a substrate holder that supports at least one substrate and exposes a first side of the substrate to the first chamber and a second side of the substrate to the second chamber. The first chamber can include an inlet for delivering at least one reagent to the first chamber for forming a film on the first side of the substrate, and the second chamber can include a removal device for removing material from the second side of the substrate.
    Type: Application
    Filed: July 25, 2008
    Publication date: January 21, 2010
    Inventors: Nagraj S. Kulkarni, Richard J. Kasica