Patents by Inventor Nai Huai Liu

Nai Huai Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fluid dispensing device for wet chemical process tank and method of using
    Patent number: 5868898
    Abstract: A wet chemical process tank for processing semiconductor wafers equipped with a specially designed fluid dispenser positioned at the bottom of the tank where the dispenser has a fluid dispensing member having an elongated body connected on at least one end to at least one support member for stabilizing the member and a fluid passage therein in fluid communication with a plurality of openings provided on at least one of the vertical sides of the member such that a fluid may only exit the member in a horizontal direction so that bubbles generated do not directly contact the semiconductor wafers suspended at the center of the tank.
    Type: Grant
    Filed: November 21, 1996
    Date of Patent: February 9, 1999
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Nai Huai Liu, Kuo Liang Lu, B. J. Chang