Abstract: A system and method of controlling a cluster tool apparatus, wherein the cluster tool includes one or more processing modules and a robot that is configured to move a semiconductor product to and from the one or more processing modules, the cluster tool configured for processing semiconductor products. The method of controlling the cluster tool apparatus to perform a processing cycle includes receiving a plurality of system parameters from a user interface, wherein the system parameters relate to one or more processing steps of the processing cycle, determining a schedule for performing the processing cycle utilizing the one or more processing modules, wherein the schedule being determined based on a semiconductor product residency parameter.

Abstract: A system and method of controlling a multi cluster tool system configured to process a semiconductor product includes a plurality of cluster tools arranged adjacent each other, a buffer module positioned between a pair of cluster tools, each cluster tool including a plurality of processing modules and a robot, the method of controlling a multi cluster tool system including receiving a plurality of system parameters from a user interface, wherein the system parameters correspond to one or more processing steps in a system cycle, wherein the system cycle is a cycle of processing the semiconductor product, determining a system schedule for defining the system cycle for processing a semiconductor product, the system schedule providing robot waiting times for each robot of each cluster tool, controlling, via a controller, the operation of each robot of each cluster tool based on the determined schedule.

Abstract: Given a sequential resource allocation system (RAS) topology structure, a state space, called an impulse state space, corresponding to the impulse response of a linear time-invariant system (LTS), is computed by small enough configuration of the considered RAS. Given an initial resource configuration of a RAS which corresponds to an input of an LTS, a complete state enumeration can be obtained by defining the convolution of this configuration with the pre-computed impulse state space. One example embodiment reduces central processing unit (CPU) time to process instructions that compute a target state space of a RAS includes constructing an initial RAS and an initial state space, and extending the initial state space iteratively under a target resource configuration.

Abstract: Given a sequential resource allocation system (RAS) topology structure, a state space, called an impulse state space, corresponding to the impulse response of a linear time-invariant system (LTS), is computed by small enough configuration of the considered RAS. Given an initial resource configuration of a RAS which corresponds to an input of an LTS, a complete state enumeration can be obtained by defining the convolution of this configuration with the pre-computed impulse state space. One example embodiment reduces central processing unit (CPU) time to process instructions that compute a target state space of a RAS includes constructing an initial RAS and an initial state space, and extending the initial state space iteratively under a target resource configuration.

Abstract: A system and method for a cluster tool apparatus for processing a semiconductor product including processing modules located adjacent each other and configured to process a semiconductor module, loadlocks configured to retain and dispense unprocessed semiconductor products and each positioned adjacent one of the processing modules, a robot configured to load, transfer and unload a semiconductor product to and from the processing modules, a hardware controller in communication with the robot and executing a method to close down the cluster tool apparatus to an idle state, the method including determining a status of the processing modules, determining if a close down process is required based on the status or based on a close down signal, and, if required, determining a schedule for a close down process based on a semiconductor product residency parameter, and controlling the operation of the robot based on the schedule to perform the close down process.

Abstract: A method determines an optimized production schedule of a production line including a hybrid multi-cluster tool formed by a plurality of single-arm tools and dual-arm tools interconnected with each other.

Abstract: A power transmission system includes a plurality of electrical substations and a plurality of transmission lines arranged to connect the plurality of electrical substations to form a power transmission network; and a controller system arranged to control a power transmission within the power transmission network. The controller system includes: a detection module arranged to detect an occurrence of a fault in at least one faulty electrical substation of the plurality of electrical substations; and a restoration module arranged to at least temporally maintain an output power of the at least one faulty electrical substation; and wherein at least one of the plurality of electrical substations is operable to facilitate maintaining of the output of the at least one faulty electrical substation upon the detection of the occurrence of the fault.

Abstract: Since single and dual-arm tools behave differently, it is difficult to coordinate their activities in a hybrid multi-cluster tool that is composed of both single- and dual-arm tools. Aiming at finding an optimal one-wafer cyclic schedule for a treelike hybrid multi-cluster tool whose bottleneck tool is process-bound, the present work extends a resource-oriented Petri net to model such system. By the developed Petri net model, to find a one-wafer cyclic schedule is to determine robot waiting times. By doing so, it is shown that, for any treelike hybrid multi-cluster tool whose bottleneck tool is process-bound, there is always a one-wafer cyclic schedule. Then, computationally efficient algorithms are developed to obtain the minimal cycle time and the optimal one-wafer cyclic schedule. Examples are given to illustrate the developed method.

Abstract: A system for fault detection and recovery of a network includes a network simulation module arranged to receive component data regarding a plurality of components that form the network and simulate the network, a modelling module arranged to utilise the simulated network to model a number of faults in the network to determine the effect of the faults on the network, and a recovery module arranged to determine a solution to the fault on the network.

Abstract: The scheduling problem of a multi-cluster tool with a tree topology whose bottleneck tool is process-bound is investigated. A method for scheduling the multi-cluster tool to thereby generate an optimal one-wafer cyclic schedule for this multi-cluster tool is provided. A Petri net (PN) model is developed for the multi-cluster tool by explicitly modeling robot waiting times such that a schedule is determined by setting the robot waiting times. Based on the PN model, sufficient and necessary conditions under which a one-wafer cyclic schedule exists are derived and it is shown that an optimal one-wafer cyclic schedule can be always found. Then, efficient algorithms are given to find the optimal cycle time and its optimal schedule. Examples are used to demonstrate the scheduling method.

Abstract: Recent trends of larger wafer and smaller lot sizes bring cluster tools with frequent lot switches. Practitioners must deal with more transient processes during such switches, including start-up and close-down processes. To obtain higher yield, it is necessary to shorten the duration of transient processes. Much prior effort was poured into the modeling and scheduling for the steady state of cluster tools. In the existing literature, no attention has been turned to optimize the close-down process for single-arm cluster tools with wafer residency constraints. This invention intends to do so by 1) developing a Petri net model to analyze their scheduling properties and 2) proposing Petri net-based methods to solve their close-down optimal scheduling problems under different workloads among their process steps. Industrial examples are used to illustrate the effectiveness and application of the proposed methods.

Abstract: For sustainable development, a refinery is required to save energy as much as possible so as to reduce the emission of greenhouse gas. In crude oil operations, oil transportation from storage tanks to charging tanks via a pipeline consumes a large portion of energy. It is vitally important to minimize energy consumption for this process. Since the oil flow resistance is proportional to the square of oil flow rate, the relation between energy efficiency and flow rate is nonlinear, which makes the problem complicated. The present invention addresses this important issue by formulating a linear programming model for the considered problem such that it can be efficiently solved. A real-world industrial case study is used to demonstrate the applications and significance of the proposed method.

Abstract: A method for operating a follower vehicle in a vehicle platoon includes determining, during operation, whether the follower vehicle is operating in a normal state or an abnormal state based on an operation condition of a component of the follower vehicle, or a communication between the follower vehicle and a preceding vehicle in the vehicle platoon. The method further includes selecting a first control mode if the follower vehicle is in the normal state and a second control mode if the follower vehicle is in the abnormal state so as to control movement of the follower vehicle using the selected control mode. In the first control mode, the follower vehicle uses communication data received from the preceding vehicle in the vehicle platoon to control its movement. In the second control mode, the follower vehicle uses data obtained by one or more of its sensors to control its movement.

Abstract: A system and method for a cluster tool apparatus for processing a semiconductor product including processing modules located adjacent each other and configured to process a semiconductor module, loadlocks configured to retain and dispense unprocessed semiconductor products and each positioned adjacent one of the processing modules, a robot configured to load, transfer and unload a semiconductor product to and from the processing modules, a hardware controller in communication with the robot and executing a method to close down the cluster tool apparatus to an idle state, the method including determining a status of the processing modules, determining if a close down process is required based on the status or based on a close down signal, and, if required, determining a schedule for a close down process based on a semiconductor product residency parameter, and controlling the operation of the robot based on the schedule to perform the close down process.

Abstract: A system and method of controlling a multi cluster tool system configured to process a semiconductor product includes a plurality of cluster tools arranged adjacent each other, a buffer module positioned between a pair of cluster tools, each cluster tool including a plurality of processing modules and a robot, the method of controlling a multi cluster tool system including receiving a plurality of system parameters from a user interface, wherein the system parameters correspond to one or more processing steps in a system cycle, wherein the system cycle is a cycle of processing the semiconductor product, determining a system schedule for defining the system cycle for processing a semiconductor product, the system schedule providing robot waiting times for each robot of each cluster tool, controlling, via a controller, the operation of each robot of each cluster tool based on the determined schedule.

Abstract: A system and method of controlling a cluster tool apparatus, wherein the cluster tool includes one or more processing modules and a robot that is configured to move a semiconductor product to and from the one or more processing modules, the cluster tool configured for processing semiconductor products. The method of controlling the cluster tool apparatus to perform a processing cycle includes receiving a plurality of system parameters from a user interface, wherein the system parameters relate to one or more processing steps of the processing cycle, determining a schedule for performing the processing cycle utilizing the one or more processing modules, wherein the schedule being determined based on a semiconductor product residency parameter.

Abstract: A method for operating a follower vehicle in a vehicle platoon includes determining, during operation, whether the follower vehicle is operating in a normal state or an abnormal state based on an operation condition of a component of the follower vehicle, or a communication between the follower vehicle and a preceding vehicle in the vehicle platoon. The method further includes selecting a first control mode if the follower vehicle is in the normal state and a second control mode if the follower vehicle is in the abnormal state so as to control movement of the follower vehicle using the selected control mode. In the first control mode, the follower vehicle uses communication data received from the preceding vehicle in the vehicle platoon to control its movement. In the second control mode, the follower vehicle uses data obtained by one or more of its sensors to control its movement.

Abstract: A power transmission system includes a plurality of electrical substations and a plurality of transmission lines arranged to connect the plurality of electrical substations to form a power transmission network; and a controller system arranged to control a power transmission within the power transmission network. The controller system includes: a detection module arranged to detect an occurrence of a fault in at least one faulty electrical substation of the plurality of electrical substations; and a restoration module arranged to at least temporally maintain an output power of the at least one faulty electrical substation; and wherein at least one of the plurality of electrical substations is operable to facilitate maintaining of the output of the at least one faulty electrical substation upon the detection of the occurrence of the fault.

Abstract: The present invention deals with microgrids, which represent a new approach to integrate distributed energy resources economically reliably and efficiently. A microgrid can operate in a connected mode if it makes an energetic exchange with a main grid or in an island mode otherwise. In its island operation mode, a microgrid ensures its energy self-sufficiency. However, the availability of resources in this mode is greatly influenced by meteorological factors and the microgrid must satisfy the high requirements on intelligent power management in order to achieve high availability of energy. The present invention provides a multi-agent control system based on the production forecasting and loads shedding for high availability of the microgrid power supply.

Abstract: A method for implementing a new reactive system and a new reactive system includes applying at least one input suitable for the new reactive system to an existing reactive system to obtain at least one output produced by the existing reactive system; comparing the at least one output with an expected output representative of an output expected to be obtained by applying the at least one input to the new reactive system; determining if the at least one output would be compatible with the expected output; and using the compatibility between the at least one output and the expected output to generate a supervisory control rule set arranged for supervisory control of the existing reactive system when used as part or whole of the new reactive system.