Abstract: Disclosed is an apparatus for batch-type large-area atomic layer deposition, which can perform an atomic layer deposition process on a plurality of large-area glass substrates. The apparatus comprises: a vacuum chamber; gate valves provided at both sides of the vacuum chamber; a process gas supply unit provided in the upper portion of the vacuum chamber and configured to inject laminar-flow process gas downward; a gas discharge unit provided in the lower portion of the vacuum chamber and configured to discharge gas from the vacuum chamber; a cassette configured to load a plurality of substrates and disposed between the process gas supply unit and the gas discharge unit; and an elevating unit provided at the side of the gas discharge unit in the vacuum chamber and configured in the vacuum chamber to elevate the cassette so as to bring the cassette into close contact with the process gas supply unit.

Abstract: A method to deposit a thin film on a flexible polymer substrate at room temperature comprising heating source vapor, which is vaporized by an evaporator, in a shower head in a reaction chamber so that the source vapor is thermally decomposed to be converted into the nano-size single phase; and depositing the source vapor in the nano-size single phase on the flexible polymer substrate which is not separately heated.

Abstract: The present invention relates a liquid crystal display device for saving a production cost. The liquid crystal display device includes a liquid crystal display panel for displaying a picture, a printed circuit board for supplying a control signal to the liquid crystal display panel, and data Chip On Film packages positioned between the liquid crystal display panel and the printed circuit board, wherein each of the data Chip On Film packages includes a data drive integrated circuit for driving data lines of the liquid crystal display panel, an effective film package having the data drive integrated circuit mounted thereto formed as a non-effective region is removed from a base film, an output pad region formed at the effective film package bonded to the liquid crystal display panel, and an input pad region formed at the effective film package bonded to the printed circuit board having a width smaller than that of the output pad region.

Abstract: A method to deposit a thin film on a flexible polymer substrate at room temperature comprising heating source vapor, which is vaporized by an evaporator, in a shower head in a reaction chamber so that the source vapor is thermally decomposed to be converted into the nano-size single phase; and depositing the source vapor in the nano-size single phase on the flexible polymer substrate which is not separately heated.