Patents by Inventor Nalin R. Parikh

Nalin R. Parikh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for selectively etching diamond
    Patent number: 5334283
    Abstract: A process for selectively etching a diamond substrate comprising the steps of forming a graphitic area within a diamond substrate and selectively etching the diamond substrate with a gaseous reactant under conditions sufficient to convert the graphitic area to a gaseous product, preferably while substantially avoiding reacting with the diamond of the diamond substrate. The technique can be used to form a single crystal diamond layer, for example, using a lift-off technique.
    Type: Grant
    Filed: August 31, 1992
    Date of Patent: August 2, 1994
    Assignee: The University of North Carolina at Chapel Hill
    Inventors: Nalin R. Parikh, John D. Hunn