Patents by Inventor Nalla Praveen

Nalla Praveen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and layers for metallization
    Patent number: 8736055
    Abstract: One aspect of the present invention is a method of making an electronic device. According to one embodiment, the method comprises depositing a cap layer containing at least one dopant onto a gapfill metal and annealing so that the at least one dopant migrates to grain boundaries and/or interfaces of the gapfill metal. Another aspect of the present invention is an electronic device.
    Type: Grant
    Filed: March 1, 2012
    Date of Patent: May 27, 2014
    Assignee: Lam Research Corporation
    Inventors: Artur Kolics, Nalla Praveen
  • METHODS AND LAYERS FOR METALLIZATION
    Publication number: 20130228923
    Abstract: One aspect of the present invention is a method of making an electronic device. According to one embodiment, the method comprises depositing a cap layer containing at least one dopant onto a gapfill metal and annealing so that the at least one dopant migrates to grain boundaries and/or interfaces of the gapfill metal. Another aspect of the present invention is an electronic device.
    Type: Application
    Filed: March 1, 2012
    Publication date: September 5, 2013
    Inventors: ARTUR KOLICS, Nalla Praveen