Abstract: A sputtering apparatus includes: a first cylindrical target and a second cylindrical target, which are arranged in a first direction and parallel to each other; a first magnet disposed in the first cylindrical target; a second magnet disposed in the second cylindrical target; and a substrate holder spaced apart from the first and second cylindrical targets in a second direction which is perpendicular to the first direction, wherein each of a first angle formed by a first imaginary straight line from a center of the first magnet to a cylindrical axis of the first cylindrical target with a first perpendicular line and a second angle formed by a second imaginary straight line from a center to of the second magnet to a cylindrical axis of the second cylindrical target with a second perpendicular line is in a range of about 30 degrees to about 180 degrees.

Abstract: Advanced treatment method and system of ethanolamine-containing wastewater are disclosed, which perform physicochemical and biological treatment processes. The method regenerates cation exchange resin that captures ethanolamine discharged from a nuclear power plant or a thermal power station, concentrates the ethanolamine-containing wastewater to reduce the volume of the wastewater, and then treats the highly concentrated ethanolamine-containing wastewater through biological decomposition and denitrification processes. The system for treating ethanolamine-containing wastewater performs the physicochemical process (ion-exchange and resin regenerations) where the waster is concentrated, and then applies the biological process to the small amount of wastewater highly concentrated. The physicochemical process is composed of exchanging ions and eluting/concentrating ethanolamine using sodium hydroxide.

Abstract: Advanced treatment method and system of ethanolamine-containing wastewater are disclosed, which perform physicochemical and biological treatment processes. The method regenerates cation exchange resin that captures ethanolamine discharged from a nuclear power plant or a thermal power station, concentrates the ethanolamine-containing wastewater to reduce the volume of the wastewater, and then treats the highly concentrated ethanolamine-containing wastewater through biological decomposition and denitrification processes. The system for treating ethanolamine-containing wastewater performs the physicochemical process (ion-exchange and resin regenerations) where the waster is concentrated, and then applies the biological process to the small amount of wastewater highly concentrated. The physicochemical process is composed of exchanging ions and eluting/concentrating ethanolamine using sodium hydroxide.