Abstract: A caster apparatus is provided. In one embodiment, there is provided a caster apparatus including a caster wheel and a first driving wheel disposed on a first side of the caster wheel. The first driving wheel is configured to be driven by a first motor. A second driving wheel is disposed on a second side opposite to the first side of the caster wheel. The second driving wheel is configured to be driven by a second motor different from the first motor. A first actuator is configured to move the first driving wheel in a vertical direction to a ground according to a curvature of the ground. A second actuator is configured to move the second driving wheel in a vertical direction to the ground according to a curvature of the ground, wherein the first and second driving wheels are configured to steer the caster wheel.

Abstract: A substrate transporting apparatus includes a first light emitting sensor emitting a first sensing light in a first direction, a first light receiving sensor receiving the first sensing light, a second light emitting sensor emitting a second sensing light in a second direction different than the first direction, a second light receiving sensor receiving the second sensing light, a substrate transporting loader passing through traveling lines of the first sensing light and the second sensing light, a state information storage unit storing state information of the substrate transporting loader, and an operation information computing unit computing operation information of the substrate transporting loader based on the state information.

Abstract: A caster apparatus is provided. In one embodiment, there is provided a caster apparatus including a caster wheel and a first driving wheel disposed on a first side of the caster wheel. The first driving wheel is configured to be driven by a first motor. A second driving wheel is disposed on a second side opposite to the first side of the caster wheel. The second driving wheel is configured to be driven by a second motor different from the first motor. A first actuator is configured to move the first driving wheel in a vertical direction to a ground according to a curvature of the ground. A second actuator is configured to move the second driving wheel in a vertical direction to the ground according to a curvature of the ground, wherein the first and second driving wheels are configured to steer the caster wheel.

Abstract: The present disclosure relates to a transfer robot and a method for controlling the same. The transfer robot includes a robot main body and a driving unit configured to move the robot main body toward a stage. The robot main body includes a distance sensor unit configured to obtain distance information between the robot main body and the stage, a first image acquisition unit configured to receive an image of a first mark of the stage and obtain a first image information, a manipulation unit configured to pick up a target object disposed on the stage, and a control unit configured to control the driving unit using the distance information and the first image information and thereby to causing the robot main body to be placed at a desired position spaced apart from the stage.

Abstract: A cassette transfer apparatus includes a holding unit configured to hold a cassette having a wafer loaded therein, the cassette having at least one stepped part, and the holding unit including at least one holding part configured to have the at least one stepped part placed thereon. The at least one stepped part includes a pair of stepped parts provided at opposite surfaces of the cassette, and the at least one holding part includes a pair of holding parts that extends back and forth and is configured to have the pair of stepped parts placed thereon.

Abstract: A substrate transporting apparatus includes a first light emitting sensor emitting a first sensing light in a first direction, a first light receiving sensor receiving the first sensing light, a second light emitting sensor emitting a second sensing light in a second direction different than the first direction, a second light receiving sensor receiving the second sensing light, a substrate transporting loader passing through traveling lines of the first sensing light and the second sensing light, a state information storage unit storing state information of the substrate transporting loader, and an operation information computing unit computing operation information of the substrate transporting loader based on the state information.

Abstract: A cassette transfer apparatus includes a holding unit configured to hold a cassette having a wafer loaded therein, the cassette having at least one stepped part, and the holding unit including at least one holding part configured to have the at least one stepped part placed thereon. The at least one stepped part includes a pair of stepped parts provided at opposite surfaces of the cassette, and the at least one holding part includes a pair of holding parts that extends back and forth and is configured to have the pair of stepped parts placed thereon.

Abstract: A haptic module using a magnetic force and an electronic apparatuses having a magnet arrangement frame arranged so that polarities of adjacent magnets are alternate; shielding screens positioned on uppers of each of frame elements of the magnet arrangement frame and formed in a window arrangement to shield any one polarity of the frame elements; linear movement apparatus fixed to outside portions of the shielding screens to move the shielding screens in a longitudinal direction of the frame element; a magnet frame positioned on an upper of the magnet arrangement frame through the shielding screen and taking on the same polarity on the whole of one surface thereof; and a controller that controls the linear movement apparatus to provide various and dynamic force feedback and tactile sensation to a user, as well as reduce complexity of a constitution as compared to a related art and further accomplish miniaturization.

Abstract: The present invention discloses a tactile feedback device for giving realistic touch sensation to the user by stimulating the skin of the user. The tactile feedback device of the present invention comprises a housing having one end positioned near the skin of the user in use, an actuator, touch pins and an elastic means. The actuator is mounted inside the housing to convert electromagnetic energy into kinetic energy. The touch pins are mounted inside the housing so as to pop in and out, and the front end thereof is popped out of one end of the housing to contact the skin, and is connected with the actuator so as to be operated by kinetic energy of the actuator. The elastic plates of the elastic means are mounted between one end of the housing and the actuator, and have the touch pins fixedly passing through so as to be interlocked with the touch pins, and when the touch pins pop in and out, they are elastically deformed to have elastic energy.

Abstract: A haptic module using a magnetic force and an electronic apparatuses having the module are disclosed. The haptic module disclosed in the present invention comprises a magnet arrangement frame arranged so that polarities of adjacent magnets are alternate; shielding screens positioned on uppers of each of frame elements of the magnet arrangement frame and formed in a window arrangement to shield any one polarity of the frame elements; linear movement means fixed to outside portions of the shielding screens to move the shielding screens in a longitudinal direction of the frame element; a magnet frame positioned on an upper of the magnet arrangement frame through the shielding screen and taking on the same polarity on the whole of one surface thereof; and a controller that controls the linear movement means.

Abstract: The present invention discloses a tactile feedback device for giving realistic touch sensation to the user by stimulating the skin of the user. The tactile feedback device of the present invention comprises a housing having one end positioned near the skin of the user in use, an actuator, touch pins and an elastic means. The actuator is mounted inside the housing to convert electromagnetic energy into kinetic energy. The touch pins are mounted inside the housing so as to pop in and out, and the front end thereof is popped out of one end of the housing to contact the skin, and is connected with the actuator so as to be operated by kinetic energy of the actuator. The elastic plates of the elastic means are mounted between one end of the housing and the actuator, and have the touch pins fixedly passing through so as to be interlocked with the touch pins, and when the touch pins pop in and out, they are elastically deformed to have elastic energy.