Abstract: A semiconductor manufacturing equipment may include a process chamber for treating a substrate; a front-end module including a first transfer robot, wherein the first transfer robot may be configured to transport the substrate received in a container; a transfer chamber between the front-end module and the process chamber, wherein the transfer chamber may be configured to load or unload the substrate into or out of the process chamber; and a cassette capable of receiving a replaceable component capable of being used in the process chamber. The front-end module may include a seat plate configured to move in a sliding manner so as to retract or extend into or from the front-end module. The cassette may be configured to be loaded into the front-end module while the cassette is seated on the seat plate.

Abstract: The present invention relates to a combination twist structure of a superconducting cable core. The present invention relates to a new type of a combination twist structure of a superconducting cable core capable of accommodating the thermal contraction of the cable core in the longitudinal direction without having a space for accommodation, thereby capable of reducing an outer diameter of the superconducting cable, and eliminating the use of an additional equipment for forming the space for accommodation. The present invention provides a combination twist structure of a superconducting cable core formed by twisting a plurality of cable cores. The cable cores are combined by repeatedly changing a twist direction of the cable cores, and the contraction of the cable cores in the longitudinal direction is accommodated by untwisting the cable cores.

Abstract: Provided is a superconducting cable provided with an enhanced cooling ability, the superconducting cable including a core including a superconducting wire rod; an inner sheath surrounding the core; an outer sheath surrounding the inner sheath; a plurality of communication pipes that have both ends communicating with the inner and outer sheaths, and are mounted in the longitudinal direction of the inner and outer sheaths; a plurality of valves that are mounted in the communication pipes; and a plurality of auxiliary cooling systems that are mounted on some of the communication pipes. Cooling fluid supplied from the cooling systems is supplied into the inner sheath through the communication pipes, and is then discharged to the outside through the valves.