Patents by Inventor Namita Adrianus GOEL

Namita Adrianus GOEL has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • DATA-DRIVEN PREDICTION AND IDENTIFICATION OF FAILURE MODES BASED ON WAFER-LEVEL ANALYSIS AND ROOT CAUSE ANALYSIS FOR SEMICONDUCTOR PROCESSING
    Publication number: 20240062356
    Abstract: A method and apparatus for analyzing an input electron microscope image of a first area on a first wafer are disclosed. The method comprises obtaining a plurality of mode images from the input electron microscope image corresponding to a plurality of interpretable modes. The method further comprises evaluating the plurality of mode images, and determining, based on evaluation results, contributions from the plurality of interpretable modes to the input electron microscope image. The method also comprises predicting one or more characteristics in the first area on the first wafer based on the determined contributions. In some embodiments, a method and apparatus for performing an automatic root cause analysis based on an input electron microscope image of a wafer are also disclosed.
    Type: Application
    Filed: December 9, 2021
    Publication date: February 22, 2024
    Applicant: ASML Netherlands B.V.
    Inventors: Huina XU, Yana MATSUSHITA, Tanbir HASAN, Ren-Jay KOU, Namita Adrianus GOEL, Hongmei LI, Maxim PISARENCO, Marleen KOOIMAN, Chrysostomos BATISTAKIS, Johannes ONVLEE