Patents by Inventor Nam Pyo Lee

Nam Pyo Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Transition flow treatment process and apparatus
    Patent number: 7156927
    Abstract: A method is provided for treating an object. In this method, a treating chemical is introduced to a bath under conditions effective to at least partially envelop the object to be treated in eddy currents of the bath liquid, followed by introducing non-treating liquid into the bath under conditions effective to at least partially envelop the object to be treated in eddy currents of the bath liquid. An apparatus for carrying out this method is also provided. This method is particularly beneficial for objects used in precision manufacturing by treatment with solutions, such as semiconductor wafers or similar substrates.
    Type: Grant
    Filed: April 3, 2002
    Date of Patent: January 2, 2007
    Assignee: FSI International, Inc.
    Inventors: Kurt Karl Christenson, Nam Pyo Lee, Gary William Michalko, Christina Ann Rathman
  • Transition flow treatment process and apparatus
    Publication number: 20030188765
    Abstract: A method is provided for treating an object. In this method, a treating chemical is introduced to a bath under conditions effective to at least partially envelop the object to be treated in eddy currents of the bath liquid, followed by introducing non-treating liquid into the bath under conditions effective to at least partially envelop the object to be treated in eddy currents of the bath liquid. An apparatus for carrying out this method is also provided.
    Type: Application
    Filed: April 3, 2002
    Publication date: October 9, 2003
    Inventors: Kurt Karl Christenson, Nam Pyo Lee, Gary William Michalko, Christina Ann Rathman