Abstract: A system including a water flow controller arranged to transmit electrical signals between a fluoride ion clean tool and a fluoride emission abatement system is provided. Fluoride gas is configured to be released from the fluoride ion clean tool and lead to the fluoride emission abatement system, and water is introduced to the fluoride emission abatement system so as to process the fluoride gas. The water flow controller further includes a receiver for accepting electrical signals from a detector. The detector is configured to measure a flow rate of fluoride gas introduced to the fluoride ion clean tool. In addition, a computing unit is configured to process electrical signals from the detector. A transmitter is configured to send commands to an actuator of the fluoride emission abatement system so as to adjust water introduced to the fluoride emission abatement system based on a processing result of the computing unit.

Abstract: An improved water purification system including a high-efficiency reverse osmosis (HERO) system and a base dosing system for rapidly raising the pH of wastewater treated in the system. The invention includes an ion exchange unit for initially removing positive and negative ions from the wastewater. A high-efficiency reverse osmosis (HERO) system is provided downstream of the ion exchange unit for further removing ions from the wastewater. A base dosing system is provided between the ion exchange unit and the HERO system for dosing a base into and rapidly raising the pH of the wastewater as the wastewater flows from the ion exchange unit into the HERO system.