Patents by Inventor Nan-Peng CHENG

Nan-Peng CHENG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fluid supply system, wafer processing system, and method of supplying fluid to wafer processing equipment
    Patent number: 10043681
    Abstract: A fluid supply system includes a pressure tank configured to contain a pressurized gas and a fluid, a delivery point configured to be connected to a point of use, a recirculation piping connecting the pressure tank to the delivery point, and a return pump connected to the recirculation piping. The recirculation piping defines a circulation path for the fluid from the pressure tank through the delivery point and back to the pressure tank. The return pump is downstream of the delivery point and upstream of the pressure tank in the circulation path.
    Type: Grant
    Filed: July 23, 2013
    Date of Patent: August 7, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ching-Jung Hsu, Yung-Ti Hung, Chun-Feng Hsu, Nan-Peng Cheng
  • FLUID SUPPLY SYSTEM, WAFER PROCESSING SYSTEM, AND METHOD OF SUPPLYING FLUID TO WAFER PROCESSING EQUIPMENT
    Publication number: 20150027552
    Abstract: A fluid supply system includes a pressure tank configured to contain a pressurized gas and a fluid, a delivery point configured to be connected to a point of use, a recirculation piping connecting the pressure tank to the delivery point, and a return pump connected to the recirculation piping. The recirculation piping defines a circulation path for the fluid from the pressure tank through the delivery point and back to the pressure tank. The return pump is downstream of the delivery point and upstream of the pressure tank in the circulation path.
    Type: Application
    Filed: July 23, 2013
    Publication date: January 29, 2015
    Applicant: Taiwna Semiconductor Manufacturing Company, Ltd.
    Inventors: Ching-Jung HSU, Yung-Ti HUNG, Chun-Feng HSU, Nan-Peng CHENG