Patents by Inventor Nana HATAYA

Nana HATAYA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF FORMING SEMICONDUCTOR DEVICE
    Publication number: 20130029470
    Abstract: A method of forming a semiconductor device includes the following processes. A dummy insulating film is formed over a semiconductor substrate by using a source material that is free of carbon as an essential component. A hole that penetrates the dummy insulating film is formed. A conductive film is formed, which covers at least a side wall of the hole of the dummy insulating film. The dummy insulating film is removed to expose an outer surface of the conductive film.
    Type: Application
    Filed: October 24, 2011
    Publication date: January 31, 2013
    Applicant: ELPIDA MEMORY, INC.
    Inventors: Nana HATAYA, Nobuyuki SAKO, Hiroki YAMAWAKI, Shun FUJIMOTO, Jiro MIYAHARA