Patents by Inventor Nancy Cantwell

Nancy Cantwell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Particle dispersing system and method for testing semiconductor manufacturing equipment
    Patent number: 5777245
    Abstract: The system and method prepare a gas stream comprising particles at a known concentration using a particle disperser for moving particles from a reservoir of particles into a stream of flowing carrier gas. The electrostatic charges on the particles entrained in the carrier gas are then neutralized or otherwise altered, and the resulting particle-laden gas stream is then diluted to provide an acceptable particle concentration. The diluted gas stream is then split into a calibration stream and the desired output stream. The particles in the calibration stream are detected to provide an indication of the actual size distribution and concentration of particles in the output stream that is supplied to a process chamber being analyzed.
    Type: Grant
    Filed: September 13, 1996
    Date of Patent: July 7, 1998
    Assignee: Applied Materials, Inc.
    Inventors: Madhavi Chandrachood, Steve G. Ghanayem, Nancy Cantwell, Daniel J. Rader, Anthony S. Geller