Patents by Inventor Nancy E. Gilbert

Nancy E. Gilbert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electroless Deposition System
    Publication number: 20110135824
    Abstract: An electroless deposition method includes providing a deposition solution, and saturating the deposition solution with an oxygen concentration in a range from about two thousand parts per million to about twenty thousand parts per million, and replenishing deionized water in the deposition solution.
    Type: Application
    Filed: February 16, 2011
    Publication date: June 9, 2011
    Inventors: Ron Rulkens, Robert D. Tas, Shashank Ravindra Kulkarni, Artur Kolics, Nancy E. Gilbert
  • Electroless deposition system
    Patent number: 7913644
    Abstract: An electroless deposition system includes a deposition solution, and saturating the deposition solution with an oxygen concentration in a range from about two thousand parts per million to about twenty thousand parts per million.
    Type: Grant
    Filed: September 30, 2006
    Date of Patent: March 29, 2011
    Assignee: Lam Research Corporation
    Inventors: Ron Rulkens, Robert D. Tas, Shashank Ravindra Kulkarni, Artur Kolics, Nancy E. Gilbert
  • Systems incorporating microwave heaters within fluid supply lines of substrate processing chambers and methods for use of such systems
    Patent number: 7845308
    Abstract: Systems having an in-line microwave heater to heat fluids for processing a substrate are provided. An embodiment of a system includes a microelectronic processing chamber, a reservoir for storing a fluid used to process wafers within the chamber, a supply line for transporting the fluid to the chamber, and a microwave heater arranged along the supply line. The system includes processor executable program instructions for operating the microwave heater at parameters configured to heat fluid within the supply line to a temperature greater than a fluid temperature within the reservoir, such as approximately 20° C. greater than the reservoir fluid temperature. It is noted that the inclusion of an in-line microwave heater is not limited to microelectronic fabrication systems, but may be used for any system in which heated fluids are used for processing a substrate, such as but not limited to electroplating or electroless plating systems.
    Type: Grant
    Filed: September 28, 2006
    Date of Patent: December 7, 2010
    Assignee: Lam Research Corporation
    Inventors: Jason Corneille, Nancy E. Gilbert, Robert D. Tas, Steven Flanders, Timothy J. Franklin, Jason R. Wright, Stephen C. Jones, Joe Laia
  • ELECTROLESS DEPOSITION SYSTEM
    Publication number: 20090288593
    Abstract: An electroless deposition system includes a deposition solution, and saturating the deposition solution with an oxygen concentration in a range from about two thousand parts per million to about twenty thousand parts per million.
    Type: Application
    Filed: September 30, 2006
    Publication date: November 26, 2009
    Applicant: BLUE 29, LLC
    Inventors: Ron Rulkens, Robert D. Tas, Shashank Ravindra Kulkarni, Artur Kolics, Nancy E. Gilbert