Abstract: A method for producing a semiconductor component with adjacent Schottky (5) and pn (9) junctions positions in a drift area (2, 10) of a semiconductor material. According to the method, a silicon carbide substrate doped with a first doping material of at least 1018 cm?3 is provided, and a silicon carbide layer with a second doping material of the same charge carrier type in the range of 1014 and 1017 cm?3 is homo-epitaxially deposited on the substrate. A third doping material with a complimentary charge carrier is inserted, and structured with the aid of a diffusion and/or ion implantation, on the silicon carbide layer surface that is arranged far from the substrate to form pn junctions. Subsequently the component is subjected to a first temperature treatment between 1400° C. and 1700° C. Following this temperature treatment, a first metal coating is deposited on the implanted surface in order to form a Schottky contact and then a second metal coating is deposited in order to form an ohmic contact.

Abstract: A method for producing a semiconductor component with adjacent Schottky (5) and pn (9) junctions positions in a drift area (2, 10) of a semiconductor material. According to the method, a silicon carbide substrate doped with a first doping material of at least 1018 cm−3 is provided, and a silicon carbide layer with a second doping material of the same charge carrier type in the range of 1014 and 1017 cm−3 is homo-epitaxially deposited on the substrate. A third doping material with a complimentary charge carrier is inserted, and structured with the aid of a diffusion and/or ion implantation, on the silicon carbide layer surface that is arranged far from the substrate to form pn junctions. Subsequently the component is subjected to a first temperature treatment between 1400° C. and 1700° C.

Abstract: The invention relates to a semiconductor component with adjacent Schottky (5) and pn (9) junctions positioned in a drift area (2, 10) of a semiconductor material. The invention also relates to a method for producing said semiconductor component.

Abstract: A semiconductor component having impurity atoms introduced by implantation which are subsequently electrically activated by way of an annealing process. Immediately after the annealing process, the component has a mean surface roughness of less than 15 nm and at least 10% of the implanted impurity atoms are electrically activated.

Abstract: The invention concerns a controllable semiconductor structure comprising a base region (101, 201, 301, 401), a source region (106, 212, 312, 412) and a drain region (107, 213, 313, 413) a conductive duct being provided in the base region between the source and drain. According to the invention, the duct can be constricted by regions lying parallel thereto, an active control region (102, 202, 302, 402) and an opposite passive control region (103, 203, 303, 403) which each form a blockable passage with the base region (101, 201, 301, 401). Further provided is a conductive connection (108, 209, 309, 409) between the passive control region (103, 203, 303, 403) and the source region (106, 212, 312, 412), the semiconductor material of the base region (101, 201, 301, 401) having an energy gap of more than 1.2 eV.