Patents by Inventor Nanoka Miyahara

Nanoka Miyahara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
    Publication number: 20240295821
    Abstract: A substrate processing method includes forming a silicon carbide film on a spin on carbon film formed on a substrate; and forming a chemically amplified resist film for EUV on the silicon carbide film.
    Type: Application
    Filed: February 21, 2022
    Publication date: September 5, 2024
    Inventors: Hiroyuki Fujii, Soichiro Okada, Yasuyuki Ido, Makoto Muramatsu, Keisuke Yoshida, Nanoka Miyahara