Abstract: A grinding mechanism is provided including a support table configured for fixing a workpiece to be ground thereon, and a sliding assembly slidably provided on the support table and including a cleaning tool. The cleaning tool includes a scraper configured to face the support table and a scraper holder to which the scraper is provided.

Abstract: The present disclosure provides a manipulator mounted between a first chamber and a second chamber of a vacuum reaction apparatus for moving a plate material from the first chamber to the second chamber. The manipulator comprises: a first supporting structure on which a rail is provided along a first direction in a horizontal plane, wherein the first chamber and the second chamber are respectively positioned at two opposite ends of the rail; an arm mounted on the first mounting structure for bearing the plate material, wherein the arm is movable along the rail; and a vertically mechanism on which the first supporting structure and the arm are mounted, wherein the vertically mechanism is capable of driving the first supporting structure and the arm to move in a vertical direction.