Patents by Inventor Nao YAMAMURA

Nao YAMAMURA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220112400
    Abstract: An aspect of the present invention is a polishing liquid containing abrasive grains, a copolymer, and a liquid medium, in which the copolymer has a structure unit derived from at least one styrene compound selected from the group consisting of styrene and a styrene derivative and a structure unit derived from acrylic acid, a content of the copolymer is more than 0.01% by mass and 0.2% by mass or less based on the total amount of the polishing liquid, and a pH of the polishing liquid is more than 4.5.
    Type: Application
    Filed: February 19, 2019
    Publication date: April 14, 2022
    Inventors: Ai FUJIMATSU, Mamiko IWANO, Nao YAMAMURA
  • Publication number: 20210189176
    Abstract: A polishing liquid containing abrasive grains, a copolymer, and a liquid medium, in which the copolymer has a structure unit derived from at least one styrene compound selected from the group consisting of styrene and a styrene derivative and a structure unit derived from at least one selected from the group consisting of acrylic acid and maleic acid, and a ratio of the structure unit derived from the styrene compound in the copolymer is 15 mol % or more.
    Type: Application
    Filed: September 29, 2017
    Publication date: June 24, 2021
    Inventors: Mamiko KANAMARU, Nao YAMAMURA
  • Publication number: 20170210958
    Abstract: A CMP polishing liquid for polishing an insulating material, comprising a cerium oxide particle satisfying the conditions (A) and (B) below, a 4-pyrone-based compound, and water: condition (A): an average particle diameter R of the cerium oxide particle is 50 nm or more and 300 nm or less, and condition (B): when the cerium oxide particle is defined as a spherical particle having the average particle diameter R, sphericity S2/S1 provided by a specific surface area S1 of the spherical particle and a specific surface area S2 of the cerium oxide particle measured by the BET method is 3.15 or less.
    Type: Application
    Filed: July 3, 2015
    Publication date: July 27, 2017
    Inventors: Takashi SHINODA, Munehiro OOTA, Nao YAMAMURA, Aiko KINO