Patents by Inventor Naoaki Izu Tani

Naoaki Izu Tani has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and device for drying substrate
    Patent number: 6962007
    Abstract: A device for drying substrates which stores a plurality of substrate (1) and which comprises a processing container (3) to which cleaning fluid (2) after cleaning the substrates (1) is drained and an injection nozzle (5) for injecting drying fluid located at the terminating part of a feed pipe (4) through which liquid drying fluid is supplied, whereby an exhaust equipment is eliminated or simplified, and the drying fluid is fed smoothly.
    Type: Grant
    Filed: August 10, 1999
    Date of Patent: November 8, 2005
    Assignees: Toho Kasei Ltd., Daikin Industries, Ltd.
    Inventors: Norio Maeda, Koji Sumi, Hiroshi Aihara, Masao Oono, Naoaki Izu Tani