Abstract: There is provided a conveying apparatus having a holding surface that holds a held surface of a substrate to convey the substrate. The conveying apparatus includes a holding pad that gets contact with an outer circumferential part of the held surface of the substrate or a side surface of the substrate and forms a space to be filled with water between the held surface of the substrate and the holding surface, a movement unit that causes the holding pad to move in such a direction as to get closer to or further away from the held surface, a water supply unit that supplies the water to the space, and a suction unit that sucks the water with which the space is filled and improves a force of holding the substrate. The conveying apparatus holds the substrate by the holding pad and conveys the substrate with the interposition of the water.