Patents by Inventor Naoaki Yokogawa

Naoaki Yokogawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • THIN-FILM DISPOSITION APPARATUS
    Publication number: 20080017500
    Abstract: A dividing plate for a thin-film deposition apparatus divides the interior of the vacuum reaction chamber into a plasma discharge space and a film deposition process space, by fixing or connecting a plurality of laminated plates together by securely bonding them over the entire area of their interfacial surfaces, or a large portion thereof.
    Type: Application
    Filed: August 7, 2007
    Publication date: January 24, 2008
    Applicant: CANON ANELVA CORPORATION
    Inventors: Masahiko Tanaka, Manabu Ikemoto, Naoaki Yokogawa
  • Thin-film disposition apparatus
    Patent number: 7267724
    Abstract: A dividing plate for a thin-film deposition apparatus divides the interior of the vacuum reaction chamber into a plasma discharge space and a film deposition process space, by fixing or connecting a plurality of laminated plates together by securely bonding them over the entire area of their interfacial surfaces, or a large portion thereof.
    Type: Grant
    Filed: May 23, 2001
    Date of Patent: September 11, 2007
    Assignee: Anelva Corporation
    Inventors: Masahiko Tanaka, Manabu Ikemoto, Naoaki Yokogawa
  • Thin-film disposition apparatus
    Publication number: 20020152960
    Abstract: A dividing plate for a thin-film deposition apparatus divides the interior of the vacuum reaction chamber into a plasma discharge space and a film deposition process space, by fixing or connecting a plurality of laminated plates together by securely bonding them over the entire area of their interfacial surfaces, or a large portion thereof.
    Type: Application
    Filed: May 23, 2001
    Publication date: October 24, 2002
    Inventors: Masahiko Tanaka, Manabu Ikemoto, Naoaki Yokogawa