Patents by Inventor Naoaki Yokokawa

Naoaki Yokokawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Magnetoresistive effect element manufacturing method and multi-chamber apparatus for manufacturing magnetoresistive effect element
    Patent number: 8119018
    Abstract: A magnetoresistive effect element manufacturing method includes a first step of preparing a magnetoresistive effect element including a magnetic film and a substrate, a second step of etching a predetermined region of the magnetic film by a reactive ion etching method, and a third step of exposing the magnetic film having undergone the second step to a plasma at an ion current density of 4×10?7 A/cm2 or less.
    Type: Grant
    Filed: September 12, 2007
    Date of Patent: February 21, 2012
    Assignee: Canon Anelva Corporation
    Inventors: Manabu Ikemoto, Tomoaki Osada, Naoaki Yokokawa
  • MAGNETORESISTIVE EFFECT ELEMENT MANUFACTURING METHOD AND MULTI-CHAMBER APPARATUS FOR MANUFACTURING MAGNETORESISTIVE EFFECT ELEMENT
    Publication number: 20090314740
    Abstract: A magnetoresistive effect element manufacturing method includes a first step of preparing a magnetoresistive effect element including a magnetic film and a substrate, a second step of etching a predetermined region of the magnetic film by a reactive ion etching method, and a third step of exposing the magnetic film having undergone the second step to a plasma at an ion current density of 4×10?7 A/cm2 or less.
    Type: Application
    Filed: September 12, 2007
    Publication date: December 24, 2009
    Applicant: CANON ANELVA CORPORATION
    Inventors: Manabu Ikemoto, Tomoaki Osada, Naoaki Yokokawa