Patents by Inventor Naoharu Shimomaura

Naoharu Shimomaura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical system adjusting method for energy beam apparatus
    Patent number: 6606149
    Abstract: A method for adjusting an optical system of an energy beam apparatus by using a mark signal that is obtained by one-dimensionally or two-dimensionally scanning a mark on a sample with an energy beam. The mark has a one-dimensional or two-dimensional periodic structure. A first mark signal is detected by scanning the mark with a beam. The mark is set on the optical axis of the optical system. A second mark signal is detected by scanning the mark with a beam. The mark is located at a position that is deviated from the optical axis. A deviation of a deflection position is determined based on a phase difference between the first and second mark signals.
    Type: Grant
    Filed: March 24, 2000
    Date of Patent: August 12, 2003
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Munehiro Ogasawara, Jun Takamatsu, Hitoshi Sunaoshi, Naoharu Shimomaura