Abstract: A substrate processing apparatus includes a plurality of functional sections 200, 300, 400 and 500 each of which is selectively set in an operating state where an assigned processing thereof is executable on a substrate and a standby state where an energy consumption amount is less than in the operating state, and an apparatus controller 50 which controls a state of each functional section 200, 300, 400, 500 between the operating state and the standby state and causes the functional section in charge of the assigned processing corresponding to a recipe to be set in the operating state and perform the assigned processing in executing the recipe specifying a processing procedure on the substrate.

Abstract: A substrate processing apparatus includes a plurality of functional sections 200, 300, 400 and 500 each of which is selectively set in an operating state where an assigned processing thereof is executable on a substrate and a standby state where an energy consumption amount is less than in the operating state, and an apparatus controller 50 which controls a state of each functional section 200, 300, 400, 500 between the operating state and the standby state and causes the functional section in charge of the assigned processing corresponding to a recipe to be set in the operating state and perform the assigned processing in executing the recipe specifying a processing procedure on the substrate.

Abstract: A setup device for automatically generating setup condition data for a process scanner is provided with an image reader and an image analyzing processor. An arbitrary number of originals are arranged on an original drum, which is mounted on the setup device. Respective images of the originals are read with an image reader of the setup device, and are statistically analyzed. A setup condition for each original is automatically determined and setup condition data representing the same is obtained. The setup condition data is stored in a floppy disk, which is transported to the process scanner. The process scanner reads the setup condition data from the floppy disk and establishes the setup condition in an image signal converter. The original drum is also transported to the process scanner, in which reproduction of the images of the originals is conducted without an operator.