Patents by Inventor Naoki AKIMOTO

Naoki AKIMOTO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam system
    Patent number: 11961704
    Abstract: There is provided a charged particle beam system having a computer system for controlling an acceleration voltage of a charged particle beam emitted from a charged particle source, the system including: a first diaphragm group having first and second diaphragms which are diaphragms that act on the charged particle beam and have different thicknesses; and a first diaphragm switching mechanism for switching the diaphragm in the first diaphragm group, in which the computer system controls the first diaphragm switching mechanism so as to switch from the first diaphragm to the second diaphragm according to an increase or decrease of the acceleration voltage.
    Type: Grant
    Filed: July 2, 2019
    Date of Patent: April 16, 2024
    Assignee: Hitachi High-Tech Corporation
    Inventors: Naoki Akimoto, Takashi Doi, Yuzuru Mochizuki
  • Charged Particle Beam System
    Publication number: 20220223372
    Abstract: There is provided a charged particle beam system having a computer system for controlling an acceleration voltage of a charged particle beam emitted from a charged particle source, the system including: a first diaphragm group having first and second diaphragms which are diaphragms that act on the charged particle beam and have different thicknesses; and a first diaphragm switching mechanism for switching the diaphragm in the first diaphragm group, in which the computer system controls the first diaphragm switching mechanism so as to switch from the first diaphragm to the second diaphragm according to an increase or decrease of the acceleration voltage.
    Type: Application
    Filed: July 2, 2019
    Publication date: July 14, 2022
    Inventors: Naoki AKIMOTO, Takashi DOI, Yuzuru MOCHIZUKI