Abstract: A thermal spray material comprising granules containing a rare earth oxyfluoride has a particle diameter of 1 to 150 ?m at a cumulative volume of 50 vol % before ultrasonic dispersion and 10 ?m or smaller after ultrasonic dispersion at 300 W for 15 minutes as determined by laser diffraction/scattering particle size distribution analysis. The particle diameter after ultrasonic dispersion is one-third or less of that before ultrasonic dispersion. The thermal spray material has an average aspect ratio of 2.0 or lower and a compressibility of 30% or less. When the granules further contain a rare earth fluoride, upon being analyzed by X-ray diffractometry using Cu-K? or Cu-K?1 radiation, S1/S2 is preferably ?0.10. S1=intensity of the maximum peak assigned to the rare earth oxyfluoride. S2=intensity of the maximum peak assigned to the rare earth fluoride, both observed in a 2? angle range of 20° to 40°.

Abstract: A thermal spray material includes granules of an oxyfluoride of yttrium (YOF). The granules may contain a fluoride of yttrium (YF3). The granules preferably have an oxygen content of 0.3 to 13.1 mass %. The granules preferably have a fracture strength of 0.3 MPa or more and less than 10 MPa. Part of yttrium (Y) of the granules may be displaced with at least one rare earth element (Ln) except yttrium, the molar fraction of Ln relative to the sum of Y and Ln being preferably 0.2 or less.