Abstract: A method of disposing a substrate on a holding unit using a pattern forming apparatus which forms a pattern on the substrate, the pattern forming apparatus comprising: a stage, the holding unit removably attached to the stage and configured to suck and hold the substrate, an optical system, and configured to detect an alignment mark of the substrate from a suction surface side of the substrate, the optical system having plural optical elements, and a detection unit configured to detect a reference mark for measuring a position of a detection field of the optical system, the method comprising: detecting a position of the reference mark, and disposing the substrate on the holding unit using the detected position of the reference mark so that the alignment mark of the substrate detected from the suction surface side of the substrate by the optical system is disposed in the detection field.

Abstract: A pattern forming apparatus configured to form a pattern on a substrate includes a holding portion configured to hold the substrate by suction, an optical system configured to detect, from a suction surface side of the substrate, an alignment mark provided to the substrate held by the holding portion, and a unit configured to shield light entering the optical system.

Abstract: A method of disposing a substrate on a holding unit using a pattern forming apparatus which forms a pattern on the substrate, the pattern forming apparatus comprising: a stage, the holding unit removably attached to the stage and configured to suck and hold the substrate, an optical system, and configured to detect an alignment mark of the substrate from a suction surface side of the substrate, the optical system having plural optical elements, and a detection unit configured to detect a reference mark for measuring a position of a detection field of the optical system, the method comprising: detecting a position of the reference mark, and disposing the substrate on the holding unit using the detected position of the reference mark so that the alignment mark of the substrate detected from the suction surface side of the substrate by the optical system is disposed in the detection field.

Abstract: To provide magnesium oxide which is excellent in hydration resistance and hardly causes volume expansion due to hydration and the like, a resin composition containing the same, and a method for producing the magnesium oxide powder. Magnesium oxide powder having a coating layer mainly comprising basic magnesium carbonate in the surface layer, when the amounts of substances of water vapor and carbon dioxide among the gas generated by thermal decomposition at 50 to 500° C. are respectively designated as m-H2O and m-CO2, in a heating evolved gas analysis (EGA-MS) method, the molar fraction represented by m-CO2/(m-H2O+m-CO2) being within the range of 0.3 to 0.6.

Abstract: A substrate holding device and a lithography apparatus that is advantageous for separation of a substrate from a seal member in a short time when the substrate is carried out. The substrate holding device including a holding member having a center part, an intake hole where air is exhausted from a space between the substrate and the holding member, an outer peripheral part provided at a position lower than the center part to surround the center part, and a seal member in the holding member to define a space.

Abstract: A pattern forming apparatus configured to form a pattern on a substrate includes a holding portion configured to hold the substrate by suction, an optical system configured to detect, from a suction surface side of the substrate, an alignment mark provided to the substrate held by the holding portion, and a unit configured to shield light entering the optical system.

Abstract: To provide magnesium oxide which is excellent in hydration resistance and hardly causes volume expansion due to hydration and the like, a resin composition containing the same, and a method for producing the magnesium oxide powder. Magnesium oxide powder having a coating layer mainly comprising basic magnesium carbonate in the surface layer, when the amounts of substances of water vapor and carbon dioxide among the gas generated by thermal decomposition at 50 to 500° C. are respectively designated as m-H2O and m-CO2, in a heating evolved gas analysis (EGA-MS) method, the molar fraction represented by m-CO2/(m-H2O+m-CO2) being within the range of 0.3 to 0.6.

Abstract: A pattern forming apparatus which forms a pattern on a substrate, which includes a movable stage, a holding unit removably attached to the stage and configured to suck and hold the substrate, an optical system of which position with respect to the holding unit is fixed, and configured to detect an alignment mark of the substrate which is sucked by the holding unit from a suction surface side of the substrate, a reference mark for measuring a position of a detection field of the optical system, and a detection system configured to detect the reference mark. The substrate is disposed on the holding unit in accordance with the position of the reference mark detected by the detection system so that the alignment mark of the substrate detected from the suction surface side of the substrate by the optical system is disposed in the detection field of the optical system.

Abstract: A holding device includes a holding member having holes for evacuating air in a space between a substrate and the holding member and an annular seal member on a lower surface of a stepped portion of the holding member for defining the space. A first region is the area of a figure having the same center as that of a plane figure of a surface of the holding member and obtained by reducing the plane figure's size by ? or more and ? or less. A second region is between the first region and the seal member. The holes are formed to satisfy a relationship of (total hole area in second region/area of second region)>(total hole area in sum region of first and second regions/area of sum region of first and second regions) and communicate with a pipe at a position corresponding to the first region of the holding member.

Abstract: A substrate holding device and a lithography apparatus that is advantageous for separation of a substrate from a seal member in a short time when the substrate is carried out. The substrate holding device including a holding member having a center part, an intake hole where air is exhausted from a space between the substrate and the holding member, an outer peripheral part provided at a position lower than the center part to surround the center part, and a seal member in the holding member to define a space.

Abstract: A holding device includes a holding member having holes for evacuating air in a space between a substrate and the holding member and an annular seal member on a lower surface of a stepped portion of the holding member for defining the space. A first region is the area of a figure having the same center as that of a plane figure of a surface of the holding member and obtained by reducing the plane figure's size by ? or more and ? or less. A second region is between the first region and the seal member. The holes are formed to satisfy a relationship of (total hole area in second region/area of second region)>(total hole area in sum region of first and second regions/area of sum region of first and second regions) and communicate with a pipe at a position corresponding to the first region of the holding member.

Abstract: A fine alkaline earth metal carbonate powder showing high dispersibility, in which the alkaline earth metal carbonate is selected from the group consisting of strontium carbonate and barium carbonate, can be prepared by a process comprising the steps of pulverizing a powder of strontium carbonate or barium carbonate in an aqueous medium using ceramic beads having a mean diameter of 10 to 1,000 ?m in the presence of a polymer comprising a polycarboxylic acid or anhydride thereof having a side chain of a polyoxyalkylene group, and drying the pulverized powder.