Patents by Inventor Naoki Go

Naoki Go has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for quality control where inspection frequency of inspection apparatus is reset to minimize expected total loss based on derived frequency function and loss value
    Patent number: 6002989
    Abstract: Inspection apparatuses of an inspection apparatus group are connected to a network and transfer inspected result to a data collection system. The same wafer selected from a specific process is inspected by the different inspection apparatuses and the inspected data are collected and analyzed to calculate a correlation degree among the inspection apparatuses. On the other hand, the course of occurrence of failures in the same process can be analyzed to thereby calculate an average occurrence frequency of failures. An optimum inspection apparatus and inspection frequency are successively obtained on the basis of calculated results of an inter-apparatus correlation degree calculation process and a failure occurrence frequency calculation process, so that a feeding method of wafers to the inspection apparatus group is indicated through an inspection apparatus group management system.
    Type: Grant
    Filed: April 1, 1997
    Date of Patent: December 14, 1999
    Assignees: Hitachi, Ltd., Hitachi Electronics Engineering Co., Ltd.
    Inventors: Masataka Shiba, Kenji Watanabe, Toshimitsu Hamada, Seiji Ishikawa, Naoki Go, Toshiaki Yachi, Tetsuya Watanabe, Takahiro Jingu