Patents by Inventor Naoki GORIKI

Naoki GORIKI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • EUV TRANSMISSIVE MEMBRANE, METHOD OF USE THEREOF, AND EXPOSURE METHOD
    Publication number: 20240094620
    Abstract: Provided is an EUV transmissive membrane including a main layer having an EUV transmittance of 85% or more at a wavelength of 13.5 nm, wherein the main layer is composed of a monolayer or a composite layer of two or more layers, and a protective layer that covers at least one side of the main layer, wherein the protective layer includes at least one selected from the group consisting of amorphous carbon, Cu, Al, and an organic resist as a main component.
    Type: Application
    Filed: October 10, 2023
    Publication date: March 21, 2024
    Applicant: NGK INSULATORS, LTD.
    Inventors: Naoki GORIKI, Takashi TANIMURA, Toshikatsu KASHIWAYA, Hiroki CHAEN
  • EUV TRANSMISSIVE MEMBRANE
    Publication number: 20240094628
    Abstract: There is provided an EUV transmissive membrane including: a main layer composed of metallic beryllium that has a first surface and a second surface; and a pair of surface layers provided on the first surface and the second surface of the main layer, each containing at least one fluoride selected from beryllium fluoride, beryllium fluoride nitride, beryllium fluoride oxide, and beryllium fluoride nitride oxide.
    Type: Application
    Filed: March 8, 2023
    Publication date: March 21, 2024
    Applicant: NGK INSULATORS, LTD.
    Inventors: Toshikatsu KASHIWAYA, Naoki GORIKI, Shoji TANGE, Atsuo KONDO
  • EUV TRANSMISSIVE FILM
    Publication number: 20230305192
    Abstract: There is provided an EUV transmissive membrane having an EUV transmittance of 80.0% or more at a wavelength of 13.5 nm and including a main layer having an IR emissivity of 2.0% or more at a wavelength of 2 µm and a protective layer that covers at least one side of the main layer and has an IR transmittance of 70% or more at a wavelength of 2 µm.
    Type: Application
    Filed: May 2, 2023
    Publication date: September 28, 2023
    Applicant: NGK INSULATORS, LTD.
    Inventors: Toshikatsu KASHIWAYA, Atsuo KONDO, Hiroki CHAEN, Takashi TANIMURA, Naoki GORIKI