Abstract: A degassing apparatus capable of preventing cross-contamination is provided. A degassing apparatus includes degassing modules each having a tube unit that is a gas permeable membrane separating a fluid circulation space and a reduced-pressure space from each other, vacuum piping communicatively connected to the reduced-pressure spaces, a discharge device that discharges gas in the reduced-pressure spaces through the vacuum piping, atmospheric release piping communicatively connected to the reduced-pressure spaces, an atmospheric release valve capable of introducing atmosphere into the reduced-pressure spaces through the atmospheric release piping, and a control unit that controls the operation of the discharge device and the atmospheric release valve.

Abstract: A resistivity regulating apparatus includes: a gas dissolving device that causes a regulating gas to dissolve in a liquid targeted for resistivity regulation to generate a treated liquid in which the regulating gas is dissolved in the liquid, the regulating gas being used to regulate a resistivity of the liquid; and a buffer tank to which the treated liquid discharged from the gas dissolving device is fed.

Abstract: Even when the flow rate at which liquid is supplied varies, the variation in the resistivity of resistivity-adjusted liquid is suppressed by using a simple structure. The hollow fiber membrane module is sectioned into a liquid-phase region and a gas-phase region by hollow fiber membranes. The liquid-phase region receives liquid L whose resistivity is to be adjusted. The gas-phase region receives adjustment gas G used to adjust a resistivity of the liquid L. The module passage pipe communicates with the liquid-phase region of the hollow fiber membrane module, the liquid supply pipe, and the liquid discharge pipe and passes through the hollow fiber membrane module. The bypass pipe communicates with the liquid supply pipe and the liquid discharge pipe and bypasses the hollow fiber membrane module. The bypass pipe includes a laminarization unit including a plurality of thin tubes thinner than the module passage pipe.

Abstract: A degassing apparatus capable of preventing cross-contamination is provided. A degassing apparatus 1 includes degassing modules 10, 20, and 30 each having a tube unit 12 that is a gas permeable membrane separating a fluid circulation space S1 and a reduced-pressure space S2 from each other, vacuum piping 40 communicatively connected to the reduced-pressure spaces S2, a discharge device 50 that discharges gas in the reduced-pressure spaces S2 through the vacuum piping 40, atmospheric release piping 60 communicatively connected to the reduced-pressure spaces S2, an atmospheric release valve 70 capable of introducing atmosphere into the reduced-pressure spaces S2 through the atmospheric release piping 60, and a control unit 80 that controls the operation of the discharge device 50 and the atmospheric release valve 70.

Abstract: A resistivity regulating apparatus includes: a gas dissolving device that causes a regulating gas to dissolve in a liquid targeted for resistivity regulation to generate a treated liquid in which the regulating gas is dissolved in the liquid, the regulating gas being used to regulate a resistivity of the liquid; and a buffer tank to which the treated liquid discharged from the gas dissolving device is fed.

Abstract: A specific resistance value adjustment apparatus includes: a hollow fiber membrane module; a module passing pipe which passes through the hollow fiber membrane module; a bypassing pipe which bypasses the hollow fiber membrane module; a liquid discharge pipe which communicates with the module passing pipe and the bypassing pipe through a joint portion; a first flow rate detection unit which detects a first flow rate of a liquid flowing to at least one of a liquid supply pipe and the liquid discharge pipe; a control valve which opens and closes the module passing pipe; and a control unit which sets an opening degree of the control valve in response to the first flow rate detected by the first flow rate detection unit.

Abstract: A resistivity regulating apparatus includes: a gas dissolving device that causes a regulating gas to dissolve in a liquid targeted for resistivity regulation to generate a treated liquid in which the regulating gas is dissolved in the liquid, the regulating gas being used to regulate a resistivity of the liquid; and a buffer tank to which the treated liquid discharged from the gas dissolving device is fed.

Abstract: A resistivity adjustment device includes: a hollow fiber membrane module that is divided by a hollow fiber membrane into a liquid phase side area; a liquid supply pipe that communicates with the liquid phase side area; a liquid discharge pipe that communicates with the liquid phase side area; a gas supply pipe that communicates with the gas phase side area; a gas discharge pipe that communicates with the gas phase side area; a bypass pipe that communicates with the liquid supply pipe and the liquid discharge pipe to bypass the hollow fiber membrane module; and a first on-off valve that is connected to the gas discharge pipe and opens or closes a first passage inside the gas discharge pipe, wherein the first on-off valve opens the first passage to discharge water accumulated in the gas phase side area.

Abstract: A resistivity regulating apparatus includes: a gas dissolving device that causes a regulating gas to dissolve in a liquid targeted for resistivity regulation to generate a treated liquid in which the regulating gas is dissolved in the liquid, the regulating gas being used to regulate a resistivity of the liquid; and a buffer tank to which the treated liquid discharged from the gas dissolving device is fed.

Abstract: A specific resistance value adjustment apparatus includes: a hollow fiber membrane module; a module passing pipe which passes through the hollow fiber membrane module; a bypassing pipe which bypasses the hollow fiber membrane module; a liquid discharge pipe which communicates with the module passing pipe and the bypassing pipe through a joint portion; a first flow rate detection unit which detects a first flow rate of a liquid flowing to at least one of a liquid supply pipe and the liquid discharge pipe; a control valve which opens and closes the module passing pipe; and a control unit which sets an opening degree of the control valve in response to the first flow rate detected by the first flow rate detection unit.

Abstract: A resistivity adjustment device includes: a hollow fiber membrane module that is divided by a hollow fiber membrane into a liquid phase side area; a liquid supply pipe that communicates with the liquid phase side area; a liquid discharge pipe that communicates with the liquid phase side area; a gas supply pipe that communicates with the gas phase side area; a gas discharge pipe that communicates with the gas phase side area; a bypass pipe that communicates with the liquid supply pipe and the liquid discharge pipe to bypass the hollow fiber membrane module; and a first on-off valve that is connected to the gas discharge pipe and opens or closes a first passage inside the gas discharge pipe, wherein the first on-off valve opens the first passage to discharge water accumulated in the gas phase side area.

Abstract: Methods and apparatus, including computer program products, to assemble a collection of documents according to a document list. The document list represents documents to be included in the collection, and includes multiple entries that identify document templates. Each document template includes instructions that a web server can execute to generate a web document based on one or more parameters. A web document corresponding to each of the multiple entries is requested; the requested web documents are received and stored in the collection of documents. Links in the received web documents can be identified and updated. The collection of documents can be accessed as part of a web site.

Abstract: Methods and apparatus, including computer program products, to assemble a collection of documents according to a document list. The document list represents documents to be included in the collection, and includes multiple entries that identify document templates. Each document template includes instructions that a web server can execute to generate a web document based on one or more parameters. A web document corresponding to each of the multiple entries is requested; the requested web documents are received and stored in the collection of documents. Links in the received web documents can be identified and updated. The collection of documents can be accessed as part of a web site.

Abstract: Methods and apparatus, including computer program products, to assemble a collection of documents according to a document list. The document list represents documents to be included in the collection, and includes multiple entries that identify document templates. Each document template includes instructions that a web server can execute to generate a web document based on one or more parameters. A web document corresponding to each of the multiple entries is requested; the requested web documents are received and stored in the collection of documents. Links in the received web documents can be identified and updated. The collection of documents can be accessed as part of a web site.

Abstract: Methods and apparatus, including computer program products, to assemble a collection of documents according to a document list. The document list represents documents to be included in the collection, and includes multiple entries that identify document templates. Each document template includes instructions that a web server can execute to generate a web document based on one or more parameters. A web document corresponding to each of the multiple entries is requested; the requested web documents are received and stored in the collection of documents. Links in the received web documents can be identified and updated. The collection of documents can be accessed as part of a web site.

Abstract: There is provided a liquid supply method in which, when preparing a solution that can be used as washing water and the like by supplying a minute amount of chemicals and the like to ultrapure water, the amount of supply solution that is supplied can be accurately determined. In this liquid supply method, a solution is prepared by supplying a supply liquid to a primary fluid that is circulating in a primary fluid circulation tube (2). This liquid supply method uses a liquid supply apparatus (1) that includes: a supply section (3) that delivers the supply liquid; and a supply liquid circulation tube (4) that causes the supply liquid to flow from the supply section (3) to the primary fluid circulation tube (2), the internal diameter of the supply liquid circulation tube (4) being between 0.01 and 1 mm.

Abstract: Methods and apparatus, including computer program products, to assemble a collection of documents according to a document list. The document list represents documents to be included in the collection, and includes multiple entries that identify document templates. Each document template includes instructions that a web server can execute to generate a web document based on one or more parameters. A web document corresponding to each of the multiple entries is requested; the requested web documents are received and stored in the collection of documents. Links in the received web documents can be identified and updated. The collection of documents can be accessed as part of a web site.

Abstract: There is provided a liquid supply method in which, when preparing a solution that can be used as washing water and the like by supplying a minute amount of chemicals and the like to ultrapure water, the amount of supply solution that is supplied can be accurately determined. In this liquid supply method, a solution is prepared by supplying a supply liquid to a primary fluid that is circulating in a primary fluid circulation tube (2). This liquid supply method uses a liquid supply apparatus (1) that includes: a supply section (3) that delivers the supply liquid; and a supply liquid circulation tube (4) that causes the supply liquid to flow from the supply section (3) to the primary fluid circulation tube (2), the internal diameter of the supply liquid circulation tube (4) being between 0.01 and 1 mm.