Patents by Inventor Naoki IMOTO

Naoki IMOTO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Processing liquid nozzle
    Patent number: 9837290
    Abstract: Disclosed is a processing liquid nozzle that supplies a processing liquid to a substrate. The processing liquid nozzle includes: a hollow nozzle body; a processing liquid flow space formed inside the nozzle body; and a processing liquid flow path configured to connect a processing liquid ejection port formed in a lower portion of the nozzle body and the processing liquid flow space with each other. The processing liquid flow path perforates the nozzle body in a vertical direction. The processing liquid flow path includes a foreign matter collecting space which is formed below an upper end of the processing liquid flow path so as to sediment and collect foreign matters in the processing liquid.
    Type: Grant
    Filed: January 16, 2015
    Date of Patent: December 5, 2017
    Assignee: Tokyo Electron Limited
    Inventors: Satoshi Nishimura, Naoki Imoto
  • PROCESSING LIQUID NOZZLE
    Publication number: 20150209814
    Abstract: Disclosed is a processing liquid nozzle that supplies a processing liquid to a substrate. The processing liquid nozzle includes: a hollow nozzle body; a processing liquid flow space formed inside the nozzle body; and a processing liquid flow path configured to connect a processing liquid ejection port formed in a lower portion of the nozzle body and the processing liquid flow space with each other. The processing liquid flow path perforates the nozzle body in a vertical direction. The processing liquid flow path includes a foreign matter collecting space which is formed below an upper end of the processing liquid flow path so as to sediment and collect foreign matters in the processing liquid.
    Type: Application
    Filed: January 16, 2015
    Publication date: July 30, 2015
    Inventors: Satoshi NISHIMURA, Naoki IMOTO