Abstract: A discharge lamp device comprising a high pressure discharge lamp having a discharge space and a pair of main electrodes in an interior of said discharge space, a starting assistance light source adapted to radiate UV radiation towards said discharge space, and a power supply device to light the high pressure discharge lamp and the starting assistance light source, wherein said starting assistance light source contains at least a rare gas for starting and carbon monoxide (CO) as a light emitting substance, and said power supply device is adapted to generate a high starting voltage at a time lighting of said high pressure discharge lamp is started and afterwards switch to a voltage for steady-state lighting, such that said starting assistance light source radiates by means of said high starting voltage but does not radiate by means of said voltage for steady-state lighting.

Abstract: The invention provides a two-stage laser mode of photolithographic molecular fluorine laser system for matching the center wavelength of an oscillation-stage laser to the center wavelength of an amplification-stage laser, thereby oscillating a laser beam having a low spectral purity and a narrow linewidth. The laser system is of the two-stage mode comprising an oscillation-stage laser 10 and an amplification-stage mode 20. The center wavelength of a laser beam emitted out of the oscillation-stage laser 10 is compared with and substantially matched to the center wavelength of a laser beam emitted out of the amplification-stage laser 20 when the latter is oscillated by itself.

Abstract: The invention provides a two-stage laser mode of photolithographic molecular fluorine laser system for matching the center wavelength of an oscillation-stage laser to the center wavelength of an amplification-stage laser, thereby oscillating a laser beam having a low spectral purity and a narrow linewidth. The laser system is of the two-stage mode comprising an oscillation-stage laser 10 and an amplification-stage mode 20. The center wavelength of a laser beam emitted out of the oscillation-stage laser 10 is compared with and substantially matched to the center wavelength of a laser beam emitted out of the amplification-stage laser 20 when the latter is oscillated by itself.

Abstract: To prevent beam fluctuation produced when a nonlinear optical crystal is maintained at a high temperature, a beam passage component is provided at the beam entrance and exit sides of the nonlinear optical crystal beam of the crystal support device, and the temperature at the end of the beam passage component away from the crystal is controlled to within a range of difference from ambient temperature at which the beam will be stable.