Patents by Inventor Naoki Noji

Naoki Noji has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polishing apparatus
    Patent number: 6629883
    Abstract: A multi-head type polishing apparatus includes a polishing table having a polishing surface, a plurality of top rings for holding workpieces and pressing the workpieces against the polishing surface, and a carousel for supporting the top rings and indexing the top rings. The polishing apparatus further includes a rotary transporter disposed in a position which can be accessed by the top rings, and having a plurality of portions positioned on a predetermined circumference from a center of rotation of the rotary transporter for holding the workpieces. The polishing apparatus also has a pusher for transferring the workpieces between the rotary transporter and the top rings.
    Type: Grant
    Filed: May 16, 2001
    Date of Patent: October 7, 2003
    Assignees: Ebara Corporation, Mitsubishi Materials Corporation
    Inventors: Seiji Katsuoka, Masahiko Sekimoto, Mitsuru Miyazaki, Naoki Noji, Kazuki Chiba, Kenji Fujimoto
  • Polishing apparatus
    Publication number: 20010044266
    Abstract: A multi-head type polishing apparatus has a plurality of top rings for holding workpieces with respect to a single polishing table. A polishing apparatus includes a polishing table having a polishing surface, a plurality of top rings for holding workpieces and pressing the workpieces against the polishing surface, and a carousel for supporting the top rings and indexing the top rings. The polishing apparatus further includes a rotary transporter disposed in a position which can be accessed by the top rings and having a plurality of portions positioned on a predetermined circumference from a center of rotation of the rotary transporter for holding the workpieces, and a pusher for transferring the workpieces between the rotary transporter and the top rings.
    Type: Application
    Filed: May 16, 2001
    Publication date: November 22, 2001
    Inventors: Seiji Katsuoka, Masahiko Sekimoto, Mitsuru Miyazaki, Naoki Noji, Kazuki Chiba, Kenji Fujimoto