Patents by Inventor Naoki Wakabayshi

Naoki Wakabayshi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR ELEMENT, AND SEMICONDUCTOR ELEMENT
    Publication number: 20170170280
    Abstract: A method for manufacturing a semiconductor element, including forming a metal film, which contains at least one metal selected from the group consisting of titanium, tungsten, molybdenum, and chromium, on a first surface of a substrate formed of silicon carbide, and forming a metal silicide film by causing a silicide reaction within an interface between the substrate and the metal film by irradiating the metal film with a pulsed laser beam having a wavelength within a range of 330 nm to 370 nm.
    Type: Application
    Filed: February 24, 2017
    Publication date: June 15, 2017
    Inventors: Naoki Wakabayshi, Teruhisa Kawasaki