Patents by Inventor Naoko KURUMOTO

Naoko KURUMOTO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20080083501
    Abstract: A substrate processing apparatus of the invention includes: a substrate holding unit that holds a substrate almost in a horizontal posture; a rotating unit that rotates the substrate held by the substrate holding unit about a vertical shaft line; and an etching liquid nozzle disposed oppositely to a bottom surface of the substrate held by the substrate holding unit and having plural discharge ports each having a different distance from a rotation center of the substrate rotated by the rotating unit so as to discharge an etching liquid toward the bottom surface of the substrate rotated by the rotating unit from the plural discharge ports.
    Type: Application
    Filed: October 10, 2007
    Publication date: April 10, 2008
    Inventors: Kenichiro ARAI, Toshio HIROE, Soichi NADAHARA, Koji HASEGAWA, Seiichiro OKUDA, Tomomasa ISHIDA, Naoko KURUMOTO, Kazunari NADA