Patents by Inventor Naomi Jenkins

Naomi Jenkins has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for performing metrology dispatching based upon fault detection
    Publication number: 20050021272
    Abstract: A method and an apparatus for dynamically adjusting a metrology routing of a batch of workpieces. The method comprises performing a process step upon a batch of workpieces using a processing tool, performing a tool state analysis upon the processing tool, and performing a dynamic metrology routing adjustment process based upon the tool state analysis. The dynamic metrology routing adjustment process further comprises correlating the tool state analysis to the batch of workpieces and adjusting a metrology routing based upon the correlation.
    Type: Application
    Filed: July 7, 2003
    Publication date: January 27, 2005
    Inventors: Naomi Jenkins, Timothy Jackson, Howard Castle, Brian Cusson