Patents by Inventor Naomi Kawaguchi

Naomi Kawaguchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of removing coating from edge of substrate
    Patent number: 6015467
    Abstract: In a method of removing a coating from an edge of a substrate a solvent reservoir is filled with a solvent to dissolve and remove a photoresist film, the solvent includes one of dipropylene glycol monoalkyl ether, a mixture of this ether and an easily volatile organic solvent (boiling point of 75-130.degree. C., vapor pressure of 5-75 mmHg at 20.degree. C.), and an alkaline aqueous solution, an edge of a substrate W is horizontally inserted in the reservoir, and thereafter, the edge of the substrate W is immersed in the solvent for a period of time, so as to dissolve and remove a coating such as photoresist from the edge of the substrate. The solvent may be filled into the solvent reservoir either before or after the edge of the substrate is inserted therein, and the method may further involve aspirating the solvent from the reservoir after the substrate edge has been inserted therein.
    Type: Grant
    Filed: May 21, 1997
    Date of Patent: January 18, 2000
    Assignee: Tokyo Ohka Kogyo Co., Ltd.
    Inventors: Koichi Nagasawa, Naomi Kawaguchi, Futoshi Shimai, Mitsuru Sato, Kouji Harada, Jun Koshiyama