Abstract: A conveyance equipment includes swirl flow-forming body, discharge fluid rectification cover and skirt. The swirl flow-forming body has columnar first body. A columnar recess is inward of lower end face of first body. A pair of fluid passages are formed in columnar first body to extend to inside surface of columnar recess and supply fluid into columnar recess to generate swirling flow. The discharge fluid rectification cover has a second body which includes a disk-shaped base plate and a peripheral wall that extends around the periphery of the base plate. The second body is positioned to cover the columnar recess. A suction port is in the bottom plate. A discharge passage is in the peripheral wall to extend generally tangential to the inside surface of peripheral wall. The skirt is cylindrical and is made of an elastic thin film, a top opening of which is connected to the suction port.

Abstract: A conveyance device includes a plate-shaped main body that faces a plate-shaped object to be conveyed, a plurality of recesses formed in the plate-shaped main body to face an outer circumferential portion of the plate-shaped object to be conveyed, a plurality of discharge channels formed inside the main body, and a plurality of movement restriction members formed on the main body to contact with and to restrict lateral movement of the plate-shaped object to be conveyed. One each of the plurality of discharge channels is connected to one each of the plurality of recesses, and a swirling flow is formed in the plurality of recesses by fluid supplied from the plurality of connected discharge channels. In each of the plurality of recesses, a portion of an opening not covered by the plate-shaped object to be conveyed is covered by one of the plurality of movement restriction members.

Abstract: A suction device that holds a member by suction in a stable manner is provided. The suction device includes a columnar main body, a flat end face formed on the main body, a concave part formed in the end face, a fluid flow-forming supply paths for forming a fluid swirl flow in the concave part by discharging fluid into the concave part, the fluid swirl flow generating negative pressure that applies suction to a member, and a linear guide groove formed on the end surface along a direction in which the fluid discharged into the concave part flows out of the concave part.

Abstract: A suction device that holds a member by suction in a stable manner is provided. The suction device includes a columnar main body, a flat end face formed on the main body, a concave part formed in the end face, a fluid flow-forming means for forming a fluid swirl flow in the concave part by discharging fluid into the concave part, the fluid swirl flow generating negative pressure that applies suction to a member, and a linear guide groove formed on the end surface along a direction in which the fluid discharged into the concave part flows out of the concave part.