Abstract: An X-ray generation device which can be efficiently used is provided. The X-ray generation device has an electron gun, a target unit, a tubular portion, a reflected electron detector, and a coil unit. The target unit includes a plurality of targets and a plurality of mark portions having a predetermined relationship with the targets, wherein each mark portion having a surface area larger than a surface area of the target when said target unit is viewed from a direction which is normal to principal faces of the target unit.

Abstract: An aperture cooling structure (a cooling structure used for the open X-ray source) 10 comprises an aperture unit 31 formed with an aperture 33, a holder 34 for holding the aperture unit 31, and a heat dissipator 36 connected to the holder 34. The aperture 33 restricts an electron beam E from passing therethrough on an electron path 4 of an X-ray generator (open X-ray source). The heat dissipator 36 has a heat dissipation member 37 including a coolant flow path constituent part 41 and a heat dissipation member 38 including a coolant flow path constituent part 42. The coolant flow path constituent part 41 and the coolant flow path constituent part 42 are combined with each other, so as to construct a coolant flow path 43.

Abstract: An X-ray generation device which can be efficiently used is provided. The X-ray generation device 1 has an electron gun 3, a target unit T, a tubular portion 5, a reflected electron detector 31, and a coil unit 9, and the target unit T includes a plurality of targets 23, and a plurality of mark portions 27 having a predetermined location relationship with the targets 23 and each having a surface area larger than a surface area of the target 23, when viewed from a normal direction to principal faces of the target unit T.

Abstract: An X-ray generation device is provided with an electron gun unit for emitting an electron beam, and a target unit having a substrate comprised of diamond, and a target body comprised of a material for generating X-rays with incidence of the electron beam thereto and buried in close contact in the substrate. An outer diameter of the target body is in the range of 0.05 to 1 ?m. An outer diameter of an irradiation field of the electron beam on the target unit is in the range of 1.1 to 2.5 times the outer diameter of the target body. The X-ray generation device irradiates the target body with the electron beam so that the target body is included in the irradiation field, thereby to generate X-rays from the target body.

Abstract: An aperture cooling structure (a cooling structure used for the open X-ray source) 10 comprises an aperture unit 31 formed with an aperture 33, a holder 34 for holding the aperture unit 31, and a heat dissipator 36 connected to the holder 34. The aperture 33 restricts an electron beam E from passing therethrough on an electron path 4 of an X-ray generator (open X-ray source). The heat dissipator 36 has a heat dissipation member 37 including a coolant flow path constituent part 41 and a heat dissipation member 38 including a coolant flow path constituent part 42. The coolant flow path constituent part 41 and the coolant flow path constituent part 42 are combined with each other, so as to construct a coolant flow path 43.