Patents by Inventor Naoshi Sakaguchi
Naoshi Sakaguchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10828694Abstract: A casting device in which refrigerant is pressure-fed to a cooling passage formed in a die, leakage of refrigerant in the die can be reliably detected in a short time without a significant modification applied to the conventional device. A casting device includes a pressure-feed device that pressure-feeds refrigerant to a cooling passage formed in a die, and a release agent coating applicator that applies a release agent to the die, and further includes a unit that mixes a fluorescent agent into the refrigerant (fluorescent agent tank), a unit that irradiates the die surface of the die with black light while the refrigerant containing the fluorescent agent mixed therein is pressure-fed to the die, and an imaging device that captures an image of the die surface. The imaging device is integrally assembled with the release agent coating applicator.Type: GrantFiled: November 18, 2016Date of Patent: November 10, 2020Assignees: TOYOTA JIDOSHA KABUSHIKI KAISHA, MEC INTERNATIONAL CO., LTD., MEIWA E-TEC CO., LTD., NIKON CORPORATIONInventors: Daisuke Serino, Fumio Kawahara, Yuzo Matsuda, Tetsushi Yamaguchi, Hiroshi Kawahara, Sakayuki Ishikawa, Takuto Takahashi, Naoshi Sakaguchi, Hiroyuki Kayaba, Takahiro Michimoto
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Patent number: 10809208Abstract: The X-ray inspection device includes a radiation source that irradiates X-rays toward a specimen that is rotated; a detector that detects transmitted X-rays irradiated by the radiation source, and passed through the specimen, and output a plurality of detection data for each angle of rotation; and a region extracting unit that extracts a region where the specimen is projected onto the detector, using the plurality of detection data.Type: GrantFiled: October 24, 2017Date of Patent: October 20, 2020Assignee: Nikon CorporationInventors: Hirotomo Yashima, Takahiro Michimoto, Naoshi Sakaguchi
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Patent number: 10571412Abstract: An X-ray apparatus includes: a mounting unit upon which an object to be measured is mounted; an X-ray generation unit that irradiates X-rays, from above the mounting unit or from below the mounting unit, to the object to be measured upon the mounting unit; an X-ray detector that acquires a transmission image of the object to be measured being irradiated by the X-rays; a first movement unit that moves at least one of the mounting unit, the X-ray generation unit, and the X-ray detector along a direction of irradiation of the X-rays; a position detection unit that detects a relative position of the mounting unit, the X-ray generation unit, and the X-ray detector; and a calculation unit that calculates a magnification of a transmission image of the object to be measured acquired by the X-ray detector, in a state in which deflection of the mounting unit has occurred while the object to be measured is mounted upon the mounting unit.Type: GrantFiled: August 7, 2014Date of Patent: February 25, 2020Assignee: Nikon CorporationInventors: Toshihisa Tanaka, Shinsuke Takeda, Naoshi Sakaguchi
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Patent number: 10533958Abstract: An X-ray apparatus includes: a mounting unit upon which an object to be measured is mounted; an X-ray generation unit that irradiates X-rays, from above the mounting unit or from below the mounting unit, to the object to be measured upon the mounting unit; an X-ray detector that acquires a transmission image of the object to be measured being irradiated by the X-rays; a first movement unit that moves at least one of the mounting unit, the X-ray generation unit, and the X-ray detector along a direction of irradiation of the X-rays; a position detection unit that detects a relative position of the mounting unit, the X-ray generation unit, and the X-ray detector; and a calculation unit that calculates a magnification of a transmission image of the object to be measured acquired by the X-ray detector, in a state in which deflection of the mounting unit has occurred while the object to be measured is mounted upon the mounting unit.Type: GrantFiled: August 7, 2014Date of Patent: January 14, 2020Assignee: Nikon CorporationInventors: Toshihisa Tanaka, Shinsuke Takeda, Naoshi Sakaguchi
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Patent number: 10502699Abstract: An X-ray apparatus includes: a mounting unit upon which an object to be measured is mounted; an X-ray generation unit that irradiates X-rays, from above the mounting unit or from below the mounting unit, to the object to be measured upon the mounting unit; an X-ray detector that acquires a transmission image of the object to be measured being irradiated by the X-rays; a first movement unit that moves at least one of the mounting unit, the X-ray generation unit, and the X-ray detector along a direction of irradiation of the X-rays; a position detection unit that detects a relative position of the mounting unit, the X-ray generation unit, and the X-ray detector; and a calculation unit that calculates a magnification of a transmission image of the object to be measured acquired by the X-ray detector, in a state in which deflection of the mounting unit has occurred while the object to be measured is mounted upon the mounting unit.Type: GrantFiled: August 7, 2014Date of Patent: December 10, 2019Assignee: Nikon CorporationInventors: Toshihisa Tanaka, Shinsuke Takeda, Naoshi Sakaguchi
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Publication number: 20190176221Abstract: A casting device in which refrigerant is pressure-fed to a cooling passage formed in a die, leakage of refrigerant in the die can be reliably detected in a short time without a significant modification applied to the conventional device. A casting device includes a pressure-feed device that pressure-feeds refrigerant to a cooling passage formed in a die, and a release agent coating applicator that applies a release agent to the die, and further includes a unit that mixes a fluorescent agent into the refrigerant (fluorescent agent tank), a unit that irradiates the die surface of the die with black light while the refrigerant containing the fluorescent agent mixed therein is pressure-fed to the die, and an imaging device that captures an image of the die surface. The imaging device is integrally assembled with the release agent coating applicator.Type: ApplicationFiled: November 18, 2016Publication date: June 13, 2019Applicants: TOYOTA JIDOSHA KABUSHIKI KAISHA, MEC International Co., Ltd., MEIWA e-TEC CO., LTD., NIKON CORPORATIONInventors: Daisuke SERINO, Fumio KAWAHARA, Yuzo MATSUDA, Tetsushi YAMAGUCHI, Hiroshi KAWAHARA, Sakayuki ISHIKAWA, Takuto TAKAHASHI, Naoshi SAKAGUCHI, Hiroyuki KAYABA, Takahiro MICHIMOTO
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Publication number: 20180045660Abstract: The X-ray inspection device includes a radiation source that irradiates X-rays toward a specimen that is rotated; a detector that detects transmitted X-rays irradiated by the radiation source, and passed through the specimen, and output a plurality of detection data for each angle of rotation; and a region extracting unit that extracts a region where the specimen is projected onto the detector, using the plurality of detection data.Type: ApplicationFiled: October 24, 2017Publication date: February 15, 2018Applicant: NIKON CORPORATIONInventors: Hirotomo YASHIMA, Takahiro MICHIMOTO, Naoshi SAKAGUCHI
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Publication number: 20170219499Abstract: An X-ray apparatus includes: a mounting unit upon which an object to be measured is mounted; an X-ray generation unit that irradiates X-rays, from above the mounting unit or from below the mounting unit, to the object to be measured upon the mounting unit; an X-ray detector that acquires a transmission image of the object to be measured being irradiated by the X-rays; a first movement unit that moves at least one of the mounting unit, the X-ray generation unit, and the X-ray detector along a direction of irradiation of the X-rays; a position detection unit that detects a relative position of the mounting unit, the X-ray generation unit, and the X-ray detector; and a calculation unit that calculates a magnification of a transmission image of the object to be measured acquired by the X-ray detector, in a state in which deflection of the mounting unit has occurred while the object to be measured is mounted upon the mounting unit.Type: ApplicationFiled: August 7, 2014Publication date: August 3, 2017Applicant: NIKON CORPORATIONInventors: Toshihisa TANAKA, Shinsuke TAKEDA, Naoshi SAKAGUCHI
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Publication number: 20140002814Abstract: An observation device (1) for observing a portion near the end of a wafer (10), comprising an imaging section (40) for Imaging an image near the end of a wafer (10) from the extending direction of the wafer (10), and an image processing section (50) for detecting the edge of a film formed on the surface of the wafer (10) is further provided, as an illumination section for illuminating a portion near the end of a wafer (10), with an epi-illumination source (48) for illuminating a portion near the end of a wafer (10) via an observation optical system (41), and a diffusion illumination source (31) arranged to face the surface of the wafer (10) and illuminate a portion near the end of a wafer (10) using diffused light.Type: ApplicationFiled: August 29, 2013Publication date: January 2, 2014Applicant: NIKON CORPORATIONInventors: Naoshi SAKAGUCHI, Takashi WATANABE, Masashi TAKAHASHI, Hiroaki OKAMOTO
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Publication number: 20110109738Abstract: An observation device (1) for observing a portion near the end of a wafer (10), comprising an imaging section (40) for imaging an image near the end of a wafer (10) from the extending direction of the wafer (10), and an image processing section (50) for detecting the edge of a film formed on the surface of the wafer (10) is further provided, as an illumination section for illuminating a portion near the end of a wafer (10), with an epi-illumination source (48) for illuminating a portion near the end of a wafer (10) via an observation optical system (41), and a diffusion illumination source (31) arranged to face the surface of the wafer (10) and illuminate a portion near the end of a wafer (10) using diffused light.Type: ApplicationFiled: October 29, 2010Publication date: May 12, 2011Inventors: Naoshi Sakaguchi, Takashi Watanabe, Masashi Takahashi, Hiroaki Okamoto
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Publication number: 20110064297Abstract: An inspecting apparatus according to the present invention has: an imaging section 30 for obtaining images of a first range and a second range of an inspection target object; the first range being shifted from the first range in a prescribed direction, a differential processing section 44 for obtaining a difference between signals of the image of the first range and that of the second range; and an inspecting section 46 for inspecting the existence of a defect in the inspection target object, based on processing results obtained from the differential processing section 44.Type: ApplicationFiled: March 5, 2010Publication date: March 17, 2011Inventors: Naoshi SAKAGUCHI, Masashi Takahashi, Takashi Watanabe
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Patent number: 7800748Abstract: An edge inspection apparatus includes: an illumination means 5 that illuminates an edge of a flat subject with diffused light from a position other than directly above or directly below a surface or a reverse surface of the subject; an imaging means 4 that takes an image of the edge from a position in a direction perpendicular to a plane parallel to the surface or the reverse surface of the subject at the same time; and an inspection means 7 that inspects conditions of a portion of the edge, which is inclined with respect to the surface or the reverse surface using the image obtained by the imaging means.Type: GrantFiled: November 10, 2008Date of Patent: September 21, 2010Assignee: Nikon CorporationInventor: Naoshi Sakaguchi
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Publication number: 20100053603Abstract: A surface inspection apparatus includes an illuminating part illuminating an edge part of a substrate from a direction deviated from a direction of normal line of the edge part by an angle being predetermined, the edge part being inclined and the substrate being an inspection target, an imaging optics forming an image from a diffracted light from a captured area of the edge part as a dark field image, an imaging part capturing the dark field image obtained by the imaging optics, and a detecting part detecting a defect based on whether or not a striated image appears on the dark field image corresponding to the edge part obtained by the imaging part.Type: ApplicationFiled: October 30, 2009Publication date: March 4, 2010Applicant: NIKON CORPORATIONInventors: Naoshi Sakaguchi, Takashi Watanabe, Daisaku Mochida
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Publication number: 20090086196Abstract: An edge inspection apparatus includes: an illumination means 5 that illuminates an edge of a flat subject with diffused light from a position other than directly above or directly below a surface or a reverse surface of the subject; an imaging means 4 that takes an image of the edge from a position in a direction perpendicular to a plane parallel to the surface or the reverse surface of the subject at the same time; and an inspection means 7 that inspects conditions of a portion of the edge, which is inclined with respect to the surface or the reverse surface using the image obtained by the imaging means.Type: ApplicationFiled: November 10, 2008Publication date: April 2, 2009Applicant: NIKON CORPORATIONInventor: Naoshi Sakaguchi