Patents by Inventor Naoshige Kawasaki

Naoshige Kawasaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ultrasonic cleaning method for semiconductor manufacturing equipment
    Publication number: 20030010353
    Abstract: An ultrasonic cleaning method for cleaning semiconductor manufacturing equipment with which a blast treated surface of a component of a sputtering equipment is cleaned, wherein de-aerated cleaning water in which the component is immersed has concentration of dissolved gasses of not more than 10 ppm, and ultrasonic power of the ultrasonic vibrator applying ultrasonic to the cleaning water is 50 W or more.
    Type: Application
    Filed: March 14, 2002
    Publication date: January 16, 2003
    Inventors: Naoshige Kawasaki, Tomohiro Ishida