Patents by Inventor Naota Tsuji

Naota Tsuji has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer transfer mechanism
    Publication number: 20060113806
    Abstract: A transfer mechanism for transferring a workpiece includes an arm member including a tip projection provided at a tip end thereof for contacting a periphery of the workpiece and restricting movement of the workpiece. The arm member further includes multiple supporting projections protruding from a top surface thereof for contacting and supporting a back side of the workpiece.
    Type: Application
    Filed: November 29, 2004
    Publication date: June 1, 2006
    Applicant: ASM JAPAN K.K.
    Inventors: Naota Tsuji, Yukihiro Mori, Takashi Hagino