Abstract: A mounting state informing apparatus includes a database, an acquisition unit, a first specifying unit, a comparison unit and an output unit. The database stores information upon a mounting position and a direction of each of multiple components belonging to a processing apparatus. The acquisition unit acquires first appearance data, which is obtained by a 3D scanner, indicating a state of an appearance of the processing apparatus. The first specifying unit identifies the multiple components based on the first appearance data and specifies a mounting position and a direction of each of the identified components. The comparison unit compares the specified mounting position and the specified direction of each of the identified components with the information upon the mounting position and the direction stored in the database. The output unit is configured to output a comparison result obtained by the comparison unit.

Abstract: There is provided a plasma processing apparatus comprising: a plasma processing chamber having an upper wall, a sidewall, and a lower wall and having therein a plasma processing space; and a magnetic shield disposed around an outer side of the sidewall and having an opening at an upper side thereof. On the assumption that an angle between a line that passes through a midpoint of an inner surface of the upper wall on the plasma processing space side and connects end points of the opening and the inner surface is ?[°] and a product ?i×t of an initial relative permeability pi of a magnetic material forming the magnetic shield and a thickness t[m] of the magnetic shield is Pmc[m], the angle ?[°] satisfies a condition ?>764×Pmc?2+179×Pmc?1+21.3.

Abstract: There is a substrate support for use in a plasma processing apparatus, the substrate support comprising: a base; a ceramic plate disposed on the base, the ceramic plate having a substrate supporting region and a ring supporting region surrounding the substrate supporting region; an insulating annular member disposed around the base and the ceramic plate; a fixed edge ring having an inner portion and an outer portion, the inner portion being supported on the ring supporting region, the outer portion being supported on the insulating annular member, the outer portion having a first width; a movable edge ring disposed above the outer portion of the fixed edge ring, the movable edge ring having a second width smaller than the first width; and an actuator configured to vertically move the movable edge ring with respect to the fixed edge ring.

Abstract: A mounting state informing apparatus includes a database, an acquisition unit, a first specifying unit, a comparison unit and an output unit. The database stores information upon a mounting position and a direction of each of multiple components belonging to a processing apparatus. The acquisition unit acquires first appearance data, which is obtained by a 3D scanner, indicating a state of an appearance of the processing apparatus. The first specifying unit identifies the multiple components based on the first appearance data and specifies a mounting position and a direction of each of the identified components. The comparison unit compares the specified mounting position and the specified direction of each of the identified components with the information upon the mounting position and the direction stored in the database. The output unit is configured to output a comparison result obtained by the comparison unit.

Abstract: There is provided a power source connection circuit, when a switch having a low dielectric strength is employed, capable of preventing excessive power consumption when the switch between an input terminal and an output terminal is turned off, and also discharging electric charges accumulated in a gate of the switch. A power source connection circuit includes a MOS switch connected to an output terminal; a step-up circuit for supplying electric charges to a gate of the MOS switch; an electric-charge discharging unit coupled between the gate and a ground terminal; and a comparator for comparing a voltage of the output terminal with a reference voltage, wherein the electric-charge discharging unit includes a rectifier unit coupled between the gate and the ground terminal, and a switch coupled in series with the rectifier unit between the gate and the ground terminal to receive an output signal of the comparator at a gate.

Abstract: There is provided a power source connection circuit, when a switch having a low dielectric strength is employed, capable of preventing excessive power consumption when the switch between an input terminal and an output terminal is turned off, and also discharging electric charges accumulated in a gate of the switch. A power source connection circuit includes a MOS switch connected to an output terminal; a step-up circuit for supplying electric charges to a gate of the MOS switch; an electric-charge discharging unit coupled between the gate and a ground terminal; and a comparator for comparing a voltage of the output terminal with a reference voltage, wherein the electric-charge discharging unit includes a rectifier unit coupled between the gate and the ground terminal, and a switch coupled in series with the rectifier unit between the gate and the ground terminal to receive an output signal of the comparator at a gate.

Abstract: A method for performing the analog to digital conversion of a repeating signal that includes performing the analog conversion of digital data and generating a reference signal, comparing the repeating signal and the reference signal, holding the comparison result at a prescribed time position of the repeating signal, and adjusting the digital data based on the held comparison result. In addition, an apparatus for performing the analog to digital conversion of a repeating signal by implementing the method described above.