Abstract: A fluid pressure regulator has a program controller, a PID controller, a second PID controller, a drive controller, a solenoid-operated valve for supplying a fluid, a solenoid-operated valve for discharging a fluid, a diaphragm, a main valve, and a pressure sensor. Based on a desired preset value and/or a desired control program inputted from an external source, the fluid pressure regulator regulates the pressure or flow rate of the fluid discharged from a discharge port of the main valve. A detecting mechanism is combined with a controlled object for supplying a controlled variable in the controlled object to the second PID controller through a feedback loop.

Abstract: A fluid pressure controller has an air supply valve plug displaceable under an action of pilot pressure of a pilot chamber. When the air supply valve plug is seated on a seat section, fluid communication between a supply port and a regulator port is interrupted. Further, the fluid pressure controller has a solenoid valve. When electric power supply to the solenoid valve is interrupted, the solenoid valve is opened to generate pilot pressure applied to the air supply valve plug by the original pressure of pressurized fluid introduced from the pressurized fluid supply source to the supply port.

Abstract: A fluid pressure regulator has a program controller, a PID controller, a second PID controller, a drive controller, a solenoid-operated valve for supplying a fluid, a solenoid-operated valve for discharging a fluid, a diaphragm, a main valve, and a pressure sensor. Based on a desired preset value and/or a desired control program inputted from an external source, the fluid pressure regulator regulates the pressure or flow rate of the fluid discharged from a discharge port of the main valve. A detecting mechanism is combined with a controlled object for supplying a controlled variable in the controlled object to the second PID controller through a feedback loop.

Abstract: A fluid pressure controller has an air supply valve plug displaceable under an action of pilot pressure of a pilot chamber. When the air supply valve plug is seated on a seat section, fluid communication between a supply port and a regulator port is interrupted. Further, the fluid pressure controller has a solenoid valve. When electric power supply to the solenoid valve is interrupted, the solenoid valve is opened to generate pilot pressure applied to the air supply valve plug by the original pressure of pressurized fluid introduced from the pressurized fluid supply source to the supply port.

Abstract: A nozzle flapper mechanism includes an electrostrictive device, a plate member coupled to the electrostrictive device, a nozzle having an orifice facing the electrostrictive device or the plate member, and a controller for applying a voltage to the electrostrictive device to keep a nozzle back pressure constant or vary the nozzle back pressure. The electrostrictive device comprises a shim, piezoelectric ceramics members disposed on the shim, and thin-film electrodes disposed on the piezoelectric ceramics members, the electrodes having an area smaller than that of the piezoelectric ceramics members, the piezoelectric ceramics members having one end directly fixed in position on a stationary member.

Abstract: A nozzle flapper mechanism includes an electrostrictive device, a plate member coupled to the electrostrictive device, a nozzle having an orifice facing the electrostrictive device or the plate member, and a controller for applying a voltage to the electrostrictive device to keep a nozzle back pressure constant or vary the nozzle back pressure. The electrostrictive device comprises a shim, piezoelectric ceramics members disposed on the shim, and thin-film electrodes disposed on the piezoelectric ceramics members, the electrodes having an area smaller than that of the piezoelectric ceramics members, the piezoelectric ceramics members having one end directly fixed in position on a stationary member.

Abstract: A nozzle flapper mechanism includes an electrostrictive device, a plate member coupled to the electrostrictive device, a nozzle having an orifice facing the electrostrictive device or the plate member, and a controller for applying a voltage to the electrostrictive device to keep a nozzle back pressure constant or vary the nozzle back pressure. The electrostrictive device comprises a shim, piezoelectric ceramics members disposed on the shim, and thin-film electrodes disposed on the piezoelectric ceramics members, the electrodes having an area smaller than that of the piezoelectric ceramics members, the piezoelectric ceramics members having one end directly fixed in position on a stationary member.