Patents by Inventor Naoto Kihara

Naoto Kihara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
    Publication number: 20020142496
    Abstract: The present invention provides an electron beam apparatus for evaluating a sample surface, which has a primary electro-optical system for irradiating a sample with a primary electron beam, a detecting system, and a secondary electro-optical system for directing secondary electron beams emitted from the sample surface by the irradiation of the primary electron beam to the detecting system.
    Type: Application
    Filed: November 2, 2001
    Publication date: October 3, 2002
    Inventors: Mamoru Nakasuji, Tohru Satake, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji, Hirosi Sobukawa, Tsutomu Karimata, Shoji Yoshikawa, Toshifumi Kimba, Shin Oowada, Mutsumi Saito, Muneki Hamashima, Toru Takagi, Naoto Kihara, Hiroshi Nishimura
  • Device for holding a sheet-like sample
    Patent number: 4448404
    Abstract: A device for holding a sheet-like sample includes table means including a reference surface capable of intimately contacting the surface of the sample and a groove formed in the reference surface and capable of being covered by the surface of the sample during the intimate contact, the groove being formed in the shape of a continuous spiral having its center substantially at the center of the reference surface, and exhaust means for exhausting the air in the groove covered by the surface of the sample.
    Type: Grant
    Filed: June 2, 1983
    Date of Patent: May 15, 1984
    Assignee: Nippon Kogaku K. K.
    Inventors: Koji Ogawa, Yoshihiko Ohtsuki, Yoshihiko Kudo, Hideo Maeda, Naoto Kihara