Abstract: A secondary electron image generated by an electron beam is detected by a secondary electron/secondary ion detector while a silicon substrate is etched by a focused ion beam from a back surface of a semiconductor chip. A time point where the electron beam transmits through the silicon substrate, a contrast of a secondary electron image of a separation layer, a polysilicon layer and the like is detected by a picture image processing system is assumed to be a processing end point. At this time, by changing a setting for an acceleration voltage of the electron beam, an arbitrary remaining silicon thickness can be obtained.

Abstract: A secondary electron image generated by an electron beam is detected by a secondary electron/secondary ion detector while a silicon substrate is etched by a focused ion beam from a back surface of a semiconductor chip. A time point where the electron beam transmits through the silicon substrate, a contrast of a secondary electron image of a separation layer, a polysilicon layer and the like is detected by a picture image processing system is assumed to be a processing end point. At this time, by changing a setting for an acceleration voltage of the electron beam, an arbitrary remaining silicon thickness can be obtained.

Abstract: The present invention relates to a method (apparatus) of processing a semiconductor apparatus, wherein a processing beam is irradiated on a semiconductor apparatus comprising an insulation film and a conductor embedded in the insulation film while the insulation film is scanned from a surface side thereof so that the insulation film and the conductor are burned and cut. The processing method (apparatus) comprises a scanning region setting step for setting a scanning region of the processing beam to a region where a scanning column direction thereof traverses a cut section of the conductor and a beam scanning step for irradiating the processing beam for scanning along the set scanning region, wherein the processing beam used for scanning a final scanning column is supplied with a dosage capable of eliminating a conductive residue generated by the irradiation of the processing beam on the conductor and attached to a cut end surface facing the final scanning column in the beam scanning step.