Abstract: A motor control device is capable of detecting, through use of a small-sized or simple device, a state of belt tension in a belt transmitting torque of an electric motor in a motor system. A motor control device includes a drive controller that outputs a drive command signal that drives an electric motor of a motor system, and a belt tension state value calculation unit that outputs a belt tension state value on a basis of a drive detection signal detecting an angle of rotation, an angular velocity, or an angular acceleration in the motor system. The belt tension state value indicates a state of belt tension in a belt. The motor system includes a load machine, a driven pulley mechanically connected to the load machine, the belt wound onto the driven pulley, a drive pulley that the belt is wound onto, and the electric motor mechanically connected to the drive pulley.

Abstract: High-accuracy dimension extraction for a complicated shape possibly appearing through semiconductor processing. A starting point and an endpoint are placed on the periphery of a graphic shape including a combination of multiple ellipses, and a curve unicursally drawn on the periphery between the two points is used as a shape mode, thereby describing a contour of an intended structure.

Abstract: In an information processing apparatus, an internal variable holding unit holds a smaller number of values of an internal variable than N, the internal variable being sequentially calculated in time series based on sensor data acquired by a sensor data acquisition unit. An internal variable calculation unit calculates the internal variable corresponding to a (j+1)-th time point (j is an integer of one to N?1) based on the sensor data at the (j+1)-th time point and the internal variable corresponding to a j-th time point. A feature calculation unit calculates a feature by extracting a statistical characteristic included in the sensor data from the first time point to the N-th time point based on the internal variable at the N-th time point. A state diagnosis unit makes a diagnosis of a state of the mechanical apparatus based on the feature.

Abstract: A positioning control device, in which motion of a motor in positioning operation of causing a mechanical load connected to the motor to move by a target moving distance is specified by operational conditions and command parameters, includes an adjustment unit performing the positioning operation based on an adjustment condition and a trial parameter, which are an operational condition and a command parameter, and determining one of the command parameters to be an excellent parameter corresponding to the adjustment condition based on an evaluation result based on the state of the motor or the mechanical load during positioning operation performed; and an estimation unit determining one of the command parameters to be an estimated excellent parameter corresponding to a non-adjustment condition, which is one type of the operational conditions, based on an adjustment record being a pair of the adjustment condition and the excellent parameter corresponding to the adjustment condition.

Abstract: A motor controller includes a drive control unit that drives a motor on the basis of a control command, operates a control target made up of the motor and a mechanical load, and performs an initialization operation of setting the control target in an initial state and an evaluation operation starting from the initial state. Further, there is a learning unit that determines the control command to be used in the evaluation operation, on the basis of the result of learning the control command used in the evaluation operation, and a state sensor signal in association with each other. Further, there is an adjustment management unit that determines, on the basis of the timing at which to perform a first process.

Abstract: Provided is a plant operation support apparatus including a plant simulator, a predictor, and a predicted KPI deriver. The plant simulator simulates a state at a current time or a predetermined time of a plant based on information obtained from the plant, to output an estimated value at the current time or the predetermined time of process data in the plant. The predictor predicts a state at a predetermined future time of the plant based on the estimated value and outputs a predicted value of the process data in the plant. The predicted KPI deriver derives a predicted KPI which is an index for monitoring the state at the future time of a task to be monitored in plant operation based on the predicted value.

Abstract: A positioning control device includes a position-command generation unit to generate a position command by which a shape of an acceleration in an accelerating section and a decelerating section is determined on the basis of a position command parameter, a drive control unit to drive a motor such that a detected position value of the motor or a control target follows the position command, an evaluation unit to calculate an evaluation value regarding positioning performance on the basis of a detected position value of the motor or the control target during execution of positioning control on the control target, and a learning unit to obtain a learning result by learning a relation between the position command parameter and the evaluation value when positioning control is executed plural times, while changing each of shapes of an acceleration in an accelerating section and a decelerating section independently.

Abstract: Target processing conditions are searched while reducing a process development time and process development costs. A processing condition search device includes a learning database including a processing database storing target processing data for a target process and a reference processing database storing reference processing data for a reference process, a teachered learning execution unit that estimates an I/O model of the target process, which is an I/O model between a target description variable and a target objective variable, a transfer learning execution unit that estimates the I/O model of the target process using a reference I/O mode between a reference description variable and a reference objective variable, and the target processing data, and a transferability determination unit that determines whether the teachered learning execution unit or the transfer learning execution unit is used to estimate the I/O model of the target process.

Abstract: A motor control device is capable of detecting, through use of a small-sized or simple device, a state of belt tension in a belt transmitting torque of an electric motor in a motor system. A motor control device includes a drive controller that outputs a drive command signal that drives an electric motor of a motor system, and a belt tension state value calculation unit that outputs a belt tension state value on a basis of a drive detection signal detecting an angle of rotation, an angular velocity, or an angular acceleration in the motor system. The belt tension state value indicates a state of belt tension in a belt. The motor system includes a load machine, a driven pulley mechanically connected to the load machine, the belt wound onto the driven pulley, a drive pulley that the belt is wound onto, and the electric motor mechanically connected to the drive pulley.

Abstract: An electric-motor control apparatus includes: a command generation unit; a drive detector; a drive-current detection unit; a current-control computation unit; a steady-state-load calculation unit; a first steady-state-load reference-value storage unit; and a tension-variation analysis unit. The command generation unit outputs a drive command signal of an electric motor; the drive detector outputs a drive detection signal of the electric motor; the control computation unit receives the drive detection signal and the drive command signal and outputs a current command value; the drive-current detection unit outputs a drive-current detection value; the current-control computation unit outputs the drive current to the electric motor; and the steady-state-load calculation unit outputs a steady-state-load calculation value. The first steady-state-load reference-value storage unit stores a first steady-state-load reference value; and the tension-variation analysis unit outputs a tension-variation analysis value.