Patents by Inventor Naoto WAKUI

Naoto WAKUI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam writing device and charged particle beam writing method
    Patent number: 11854764
    Abstract: In one embodiment, a charged particle beam writing device writes sequentially patterns to a plurality of deflection positions on a target object by deflecting a charged particle beam by a deflector.
    Type: Grant
    Filed: March 15, 2022
    Date of Patent: December 26, 2023
    Assignee: NuFlare Technology, Inc.
    Inventors: Junpei Yasuda, Naoto Wakui
  • CHARGED PARTICLE BEAM WRITING DEVICE AND CHARGED PARTICLE BEAM WRITING METHOD
    Publication number: 20220301818
    Abstract: In one embodiment, a charged particle beam writing device writes sequentially patterns to a plurality of deflection positions on a target object by deflecting a charged particle beam by a deflector.
    Type: Application
    Filed: March 15, 2022
    Publication date: September 22, 2022
    Applicant: NuFlare Technology, Inc.
    Inventors: Junpei YASUDA, Naoto WAKUI